Aerosol plasma deposition method for preparation of lead zirconate titanate thick films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 5 A, 2005, Pages 3240-3241

  Peng, Cheng Jien ^a   Wang, Shih Chieh ^b   Wang, Sea Fue ^b   Chang, Chih Shiang ^a   Lin, Tzer Sheng ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

Aerosol; Deposition; Ferroelectrics; Film; Microwave plasma; PZT

Indexed keywords

AEROSOLS; AGGLOMERATION; ANNEALING; DEPOSITION; FILMS; HYSTERESIS; JETS; REMANENCE;

AEROSOL DEPOSITION; AEROSOL PLASMA DEPOSITION METHODS; CARRIER GASES; LEAD ZIRCONATE TITANATE;

TITANIUM OXIDES;

EID: 22544450767     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.3240     Document Type: Article

References (15)

1. J. Chu, I. Itoh, C. Lee and T. Suga: J. Vac. Sci. Technol. B 15 (1997) 1551.
2. A. Schroth, M. Ichiki, R. Maeda, J. Akedo and S. Matsumoto: Proc. SPIE 3242 (1997) 172.
3. A. Patel, P. C. Osbond, N. M. Shorrocks, R. C. Twiney, R. Whatmore and R. Watton: Proc. 9th IEEE Int. Symp. Applications of Ferroelectrics, 1994, p. 647.
4. Ph. Luginbuhl, S. D. Collins, G.-A. Racine, M.-A. Grétillat, N. F. De Rooij and K. G. Brooks: Sens. Actual. A 64 (1998) 41.
5. J. J. Bernstein, J. Bottari, K. Houston, G. Kirkos, R. Miller, B. Xu, Y. Ye and L. E. Cross: Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, 2000, p. 281.
6. P. Murait: Integrated Ferroelectr. 17 (1997) 297.
7. C.-J. Peng, H. Hu and S. B. Krupanidhi: Appl. Phys. Lett. 63 (1993) 734.
8. J. Akedo, M. Ichiki, K. Kikuchi and R. Maeda: Sens. Actual. A 69 (1998) 106.
9. J. Akedo and M. Lebedev: Jpn. J. Appl. Phys. 38 (1999) 5397.
10. J. Akedo and M. Lebedev: Jpn. J. Appl. Phys. 41 (2002) 6980.
11. B. F.-Y. Chen, C.-J. Peng, T.-S. Lin and H.-Y. Wen: Proc. 4th Nanotechnol. & MEMS Workshop, Taiwan, R.O.C., 2001 p. 3-1.
12. V. M. Kozhevin: Final report of collaborative work between MRL/ITRI and A. F. Ioffe Physico-Technical Institute, RAS, Russia - "Modeling of the interaction of microwave plasma with nanoparticles and study of charged particles decomposition" (2002).
13. V. M. Kozhevin, D. A. Yavsin, V. M. Kouznetsov, V. M. Busov, V. M. Mikushkin, S. Yu. Nikonov, S. A. Gurevich and A. Kolobov: J. Vac. Sci. Technol. B 18 (2000) 1402.
14. J. Akedo, M. Lebedev and S. Baba: Jpn. J. Appl. Phys. 42 (2003) 5931.
15. M.-R. Huang, C.-J. Peng and H.-Y. Lu: J. Am. Ceram. Soc. 86 (2003) 2167.