Lead zirconate titanate thin films by aerosol plasma deposition: Microstructure analysis

Journal of the American Ceramic Society

Volumn 86, Issue 12, 2003, Pages 2167-2175

  Huang, Ming Ren ^a   Peng, Cheng Jien ^a,b   Lu, Hong Yang ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOLS; CRYSTAL MICROSTRUCTURE; DEPOSITION; NIOBIUM COMPOUNDS; OXIDES; PIEZOELECTRIC MATERIALS; PLASMA APPLICATIONS; SEMICONDUCTING SILICON; SUBSTRATES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

AEROSOL PLASMA DEPOSITION; LEAD ZIRCONATE TITANATE; SOLID STATE REACTED POWDER;

LEAD COMPOUNDS;

EID: 0346306151     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.2003.tb03626.x     Document Type: Article

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