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Volumn 3, Issue , 2003, Pages 1195-1205

Micro-mirror Arrays for adaptive wavefront correction

Author keywords

[No Author keywords available]

Indexed keywords

CARBON FIBERS; ELECTRIC POTENTIAL; GRAVITATION; OPTICAL SYSTEMS; POLYMERS; PROBLEM SOLVING; REINFORCEMENT; WAVEFRONTS;

EID: 22144495015     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (2)

References (12)
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    • G. Vdovin, Micromachined Membrane Deformable Mirrors, Optical engineering. 67, pp. 231-248, 2000
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    • Vdovin, G.1
  • 3
    • 0002810507 scopus 로고    scopus 로고
    • Digital light processing and MEMS: Timely convergence for a bright future
    • SPIE Plenary Session Paper
    • L.J. Hornbeck, Digital Light Processing and MEMS: Timely Convergence for a bright future, Micromachining and Microfabrication 1995, SPIE Plenary Session Paper
    • Micromachining and Microfabrication 1995
    • Hornbeck, L.J.1
  • 4
    • 0035763855 scopus 로고    scopus 로고
    • Active-matrix addressed micromirror array for wavefront correction in adaptive optics
    • MOEMS and Miniaturized Systems II
    • A. Gehner, W. Doleschal, A. Eigner, R. Kauert, D. Kunze, M. Wildenhain, Active-matrix addressed micromirror array for wavefront correction in adaptive optics, SPIE Proc.Vol. 4561, MOEMS and Miniaturized Systems II, pp. 265-275, 2001
    • (2001) SPIE Proc. , vol.4561 , pp. 265-275
    • Gehner, A.1    Doleschal, W.2    Eigner, A.3    Kauert, R.4    Kunze, D.5    Wildenhain, M.6
  • 5
    • 0035765898 scopus 로고    scopus 로고
    • Design and fabrication of micromirror arrays for UV lithography
    • MOEMS and Miniaturized Systems II
    • H. Lakner, P. Dürr, U. Dauderstädt, W. Doleschal, J. Amelung, Design and fabrication of micromirror arrays for UV lithography, SPIE Proc.Vol. 4561, MOEMS and Miniaturized Systems II, pp. 255-264, 2000
    • (2000) SPIE Proc. , vol.4561 , pp. 255-264
    • Lakner, H.1    Dürr, P.2    Dauderstädt, U.3    Doleschal, W.4    Amelung, J.5
  • 7
    • 0035765788 scopus 로고    scopus 로고
    • VictorEsch etal: Optical performance of pivoting micromirrors
    • MOEMS and Miniaturized Systems II
    • Olga Blum Spahn, Ernest J. Garcia, VictorEsch etal: Optical performance of pivoting micromirrors; MOEMS and Miniaturized Systems II, proceedings of SPIE Vol. 4561 (2001), page 283-292.
    • (2001) Proceedings of SPIE , vol.4561 , pp. 283-292
    • Spahn, O.B.1    Garcia, E.J.2
  • 8
    • 0000960024 scopus 로고    scopus 로고
    • Pivoting micromirror designs for large orientation angles
    • MOEMS and Miniaturized Systems
    • Ernest J. Garcia: Pivoting micromirror designs for large orientation angles; MOEMS and Miniaturized Systems, proceedings of SPIE Vol. 4178 (2000), page 126-136 - 292.
    • (2000) Proceedings of SPIE , vol.4178
    • Garcia, E.J.1
  • 10
    • 0010097745 scopus 로고    scopus 로고
    • Micromirrors and micromirror arrays for scanning applications
    • MOEMS and Miniaturized systems
    • Thomas Gessner, Steffen Kurth etal.: Micromirrors and micromirror arrays for scanning applications; MOEMS and Miniaturized systems, Proc. SPIE Vol. 4178 (2000), page 338-347
    • (2000) Proc. SPIE , vol.4178 , pp. 338-347
    • Gessner, T.1    Kurth, S.2
  • 11
    • 22144436877 scopus 로고    scopus 로고
    • Development and manufacturing require-ments for MOEMS based optical modules
    • California
    • Felix Rudolf, Patrick Debergh, Philippe Regnault: Development and manufacturing require-ments for MOEMS based optical modules; Proceedings of Sensors Expo Anaheim, California (2000), page 451
    • (2000) Proceedings of Sensors Expo Anaheim , pp. 451
    • Rudolf, F.1    Debergh, P.2    Regnault, P.3
  • 12
    • 0019927495 scopus 로고
    • Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry
    • M.Takeda, H. Ina, S. Kobayashi, "Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry", JOSA, USA, vol.72, no.1, p.156-60, 1982
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.