Optical performance of pivoting micromirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4561, Issue , 2001, Pages 283-292

  Spahn, Olga Blum ^a   Garcia, Ernest J ^a   Esch, Victor ^a   Grossetete, Grant ^a   Bitsie, Fernando ^a   Mani, Sita ^a   Jakubczak, Jay ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Optical performance; Surface micromachined mirrors; Switching speed; Tilt angle

Indexed keywords

INTERFEROMETRY; METALLIZING; MICROMACHINING; STIFFNESS; SURFACE ROUGHNESS; SWITCHING;

MICROMIRRORS;

MIRRORS;

EID: 0035765788     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.443097     Document Type: Article

References (5)

1. E.J. Garcia, "Pivoting Micromirror Designs for Large Orientation Angles," Proc. SPIE Symposium on Micromachining and Microfabrication, MOEMS and Miniaturized Systems, Santa Clara, CA, vol. 4178, pp. 126-136, September 18-21, 2000.
2. Chung S.W., Kim Y.K., "Measurements of a fabricated micro mirror using a lateral-effect position-sensitive photodiode", IEEE Transactions On Industrial Electronics, v.45 6, pp. 861-865, 1998.
3. Xia X.H., Ashruf C.M.A., French P.J., Kelly J.J., "Galvanic cell formation in silicon/metal contacts: The effect on silicon surface morphology", Chemistry Of Materials, v. 12 6, pp. 1671-1678 2000.
4. D.L. Hetherington, J.J. Sniegowski, "Improved Polysilicon Surface-micromachined Micromirror Devices using Chemical-mechanical Polishing", presented at the International Symposium on Optical Science, Engineering, and Instrumentation, SPIE's 43rd Annual Meeting, San Diego, CA, July 22, 1998.
5. J. Talghader, K. Cao, "High-Reflectivity, High-Flatness, Multilayer Optical Coatings on Micromirrors", presented at 2000 IEEE/LEOS International Conference on Optical MEMS, post deadline paper session, 21-24 Aug. 2000, Kauai, HI, USA.