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Volumn 31, Issue 1, 2005, Pages 63-69

Metrological applications of Mueller polarimetry in conical diffraction for overlay characterization in microelectronics

(4) Novikova, T a De Martino, A a Ossikovski, R a Drevillon B a

a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; IMAGING SYSTEMS; INTEGRATED CIRCUITS; LITHOGRAPHY; MASKS; MEASUREMENT THEORY; PATTERN RECOGNITION; POLARIMETERS; PROCESS CONTROL;

CRITICAL DIMENSION (CD); DIFFRACTION AND SCATTERING; MUELLER POLARIMETRY; PATTERN TRANSFER;

MICROELECTRONICS;

EID: 22144469417 PISSN: 12860042 EISSN: None Source Type: Journal
DOI: 10.1051/epjap:2005034 Document Type: Article

Times cited : (31)

References (23)

1
- 2942745640
- Semiconductor Industry Association
- International Technology Roadmap for Semiconductors: 2003 Edition, Semiconductor Industry Association, http://public.itrs.net/
- International Technology Roadmap for Semiconductors: 2003 Edition

2
- 0005010756
- R.M. Silver, J. Jun, S. Fox, E. Kornegay, Future Fab Intl. 11, 8 (2001)
- (2001) Future Fab Intl. , vol.11 , pp. 8
- Silver, R.M.¹ Jun, J.² Fox, S.³ Kornegay, E.⁴

3
- 4344609769
- M. Bishop, B. Russo, Future Fab Intl. 13, 284 (2002)
- (2002) Future Fab Intl. , vol.13 , pp. 284
- Bishop, M.¹ Russo, B.²

4
- 0036029659
- Q. Wu et al., Proc. SPIE 4689, 364 (2002)
- (2002) Proc. SPIE , vol.4689 , pp. 364
- Wu, Q.¹

5
- 0033690048
- X. Yin et al., Proc. SPIE 3998, 449 (2000)
- (2000) Proc. SPIE , vol.3998 , pp. 449
- Yin, X.¹

6
- 0035336421
- X. Niu, N. Jakatdar, J. Bao, C.J. Spanos, IEEE T. Semiconduct. M. 14, 97 (2001)
- (2001) IEEE T. Semiconduct. M. , vol.14 , pp. 97
- Niu, X.¹ Jakatdar, N.² Bao, J.³ Spanos, C.J.⁴

7
- 0036868680
- A. Hettwer, N. Benesch, C. Schneider, L. Pfitzner, H. Ryssel, IEEE T. Semiconduct. M. 15, 470 (2002)
- (2002) IEEE T. Semiconduct. M. , vol.15 , pp. 470
- Hettwer, A.¹ Benesch, N.² Schneider, C.³ Pfitzner, L.⁴ Ryssel, H.⁵

8
- 1542276739
- B. Kaplan, T. Novikova, A. De Martino, B. Drévillon, Appl. Opt. 43, 1233 (2004)
- (2004) Appl. Opt. , vol.43 , pp. 1233
- Kaplan, B.¹ Novikova, T.² De Martino, A.³ Drévillon, B.⁴

9
- 22144495542
- J.L. Pezzaniti, R.A. Chipman, Opt. Eng. 34, 1568 (1995)
- (1995) Opt. Eng. , vol.34 , pp. 1568
- Pezzaniti, J.L.¹ Chipman, R.A.²

10
- 0001571398
- E. Compain, B. Drévillon, Rev. Sci. Instrum. 68, 2671 (1997)
- (1997) Rev. Sci. Instrum. , vol.68 , pp. 2671
- Compain, E.¹ Drévillon, B.²

11
- 0009361989
- J. Lee, J. Koh, R.W. Collins, Opt. Lett. 25, 1573 (2000)
- (2000) Opt. Lett. , vol.25 , pp. 1573
- Lee, J.¹ Koh, J.² Collins, R.W.³

12
- 17144467737
- E. Garcia-Caurel, A. De Martine, B. Drévillon, Thin Solid Films 455-456, 120 (2004)
- (2004) Thin Solid Films , vol.455-456 , pp. 120
- Garcia-Caurel, E.¹ De Martine, A.² Drévillon, B.³

13
- 0005023818
- N.T. Sullivan, AIP Conf. Proc. 550, 346 (2001)
- (2001) AIP Conf. Proc. , vol.550 , pp. 346
- Sullivan, N.T.¹

14
- 0003808259
- North Holland
- R.M.A. Azzam, N.M. Bashara, Ellipsometry and polarized light, 2nd edn. (North Holland, 1986)
- (1986) Ellipsometry and Polarized Light, 2nd Edn.
- Azzam, R.M.A.¹ Bashara, N.M.²

15
- 0001583920
- R.W. Collins, Rev. Sci. Instrum. 61, 2029 (1990)
- (1990) Rev. Sci. Instrum. , vol.61 , pp. 2029
- Collins, R.W.¹

16
- 0004188440
- Academie Verlag, Berlin
- A. Röseler, Infrared Spectroscopic ellipsometry (Academie Verlag, Berlin, 1990)
- (1990) Infrared Spectroscopic Ellipsometry
- Röseler, A.¹

17
- 0027882071
- B. Drévillon, Prog. Cryst. Growth Ch. 27, 1 (1993)
- (1993) Prog. Cryst. Growth Ch. , vol.27 , pp. 1
- Drévillon, B.¹

18
- 4344599788
- A. Weidner, M. Slodowski, C. Halm, C. Schneider, L. Pfizner, Proc. SPIE 5375, 232 (2004)
- (2004) Proc. SPIE , vol.5375 , pp. 232
- Weidner, A.¹ Slodowski, M.² Halm, C.³ Schneider, C.⁴ Pfizner, L.⁵

19
- 0029307028
- M.G. Moharam, E.B. Grann, D.A. Pommet, T.K. Gaylord, J. Opt. Soc. Am. A 12, 1068 (1995)
- (1995) J. Opt. Soc. Am. A , vol.12 , pp. 1068
- Moharam, M.G.¹ Grann, E.B.² Pommet, D.A.³ Gaylord, T.K.⁴

20
- 0029306568
- M.G. Moharam, D.A. Pommet, E.B. Grann, T.K. Gaylord, J. Opt. Soc. Am. A 12, 1077 (1995)
- (1995) J. Opt. Soc. Am. A , vol.12 , pp. 1077
- Moharam, M.G.¹ Pommet, D.A.² Grann, E.B.³ Gaylord, T.K.⁴

21
- 0002127645
- L. Li, J. Opt. Soc. Am. A 13, 1024 (1996)
- (1996) J. Opt. Soc. Am. A , vol.13 , pp. 1024
- Li, L.¹

22
- 0030241250
- L. Li, J. Opt. Soc. Am. A 13, 1870 (1996)
- (1996) J. Opt. Soc. Am. A , vol.13 , pp. 1870
- Li, L.¹

23
- 0003923946
- Springer-Verlag, Berlin
- R. Petit, Electromagnetic Theory of Grating (Springer-Verlag, Berlin, 1980)
- (1980) Electromagnetic Theory of Grating
- Petit, R.¹

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