Fabrication development for nanowire GHz-counting-rate single-photon detectors

IEEE Transactions on Applied Superconductivity

Volumn 15, Issue 2 PART I, 2005, Pages 626-630

  Yang, Joel K W ^a   Dauler, Eric ^a   Ferri, Antonin ^a,b   Pearlman, Aaron ^c   Verevkin, Aleksandr ^c   Gol'tsman, Gregory ^d   Voronov, Boris ^d   Sobolewski, Roman ^c,e   Keicher, William E ^a   Berggren, Karl K ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b ECOLE NORMALE SUPÉRIEURE   (France)

^c UNIVERSITY OF ROCHESTER   (United States)

^d MOSCOW STATE PEDAGOGICAL UNIVERSITY   (Russian Federation)

^e INSTITUTE OF PHYSICS   (Poland)

Author keywords

Epitaxial niobium nitride thin films; Hydrogen silsesquioxane electron beam resist; Superconductive single photon detectors

Indexed keywords

BANDWIDTH; ELECTRON BEAM LITHOGRAPHY; NANOSTRUCTURED MATERIALS; OPTICAL COMMUNICATION; OPTIMIZATION; PHOTODETECTORS; PHOTONS; PHOTOSENSITIVITY; POLYMETHYL METHACRYLATES; SEMICONDUCTING FILMS; SUPERCONDUCTIVITY;

ELECTRON-BEAM RESIST; EPITAXIAL NIOBIUM-NITRIDE THIN FILMS; HYDROGEN SILSESQUIOXANE; NANOWIRES; SUPERCONDUCTIVE SINGLE-PHOTON DETECTORS;

SUPERCONDUCTING DEVICES;

EID: 22044440023     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2005.849971     Document Type: Conference Paper

References (11)

1. G. Gol'tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Dzardanov, K. Smirnov, A. Semenov, B. Voronov, C. Williams, and R. Sobolewski, "Fabrication and properties of an ultrafast NbN hot-electron single-photon detector,"IEEE Trans. Appl. Supercond., vol. 11, pp. 574-577, 2001.
2. G. N. Gol'tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, "Picosecond superconducting single-photon optical detector,"Appl. Phys. Lett., vol. 79, pp. 705-707, 2001.
3. G. N. Gol'tsman, K. Smirnov, P. Kouminov, B. Voronov, N. Kaurova, V. Drakinsky, J. Zhang, A. Verevkin, and R. Sobolewski, "Fabrication of nanostructured superconducting single-photon detectors,"IEEE Trans. Appl. Supercond., vol. 13, pp. 192-195, 2003.
4. R. V. Sobolewski, A. Verevkin, G. N. Gol'tsman, A. Lipatov, and K. Wilsher, "Ultrafast superconducting single-photon optical detectors and their applications,"IEEE Trans. Appl. Supercond., vol. 13, pp. 1151-1157, 2003.
5. B. Delaet, J. C. Villegier, W. Escoffier, J.-L. Thomassin, P. Feautrier, I. Wang, P. Renaud-Goud, and J.-P. Poizat, "Fabrication and characterization of ultra-thin NbN hot electron bolometer for near infrared single photon detection,"Nuclear Instrum. Methods Phys. Res. A, vol. 520, pp. 541-543, 2004.
6. S. Cherednichenko, P. Yagoubov, K. Il'in, G. N. Gol'tsman, and E. Gershenzon, "Large bandwidth of NbN phononcooled hot-electron bolometer mixers on sapphire substrates,"in Proc. 8th Int. Symp. Space Terahertz Technol., Cambridge, MA, 1997.
7. A. D. Semenov, G. N. Gol'tsman, and A. A. Korneev, "Quantum detection by current carrying superconducting film,"Physica C, vol. 351, pp. 349-356, 2001.
8. M. Hatzakis, B. J. Canavello, and J. M. Shaw, "Single-step optical lift-off process,"IBM J. Res. Develop., vol. 24, pp. 452-460, 1980.
9. W. Henschel, Y. M. Georgiev, and H. Kurz, "Study of a high contrast process for hydrogen silsesquioxane as a negative tone electron beam resist,"J. Vacuum Sci. Technol. A (Vacuum Surfaces, Films), vol. 21, pp. 2018-2025, 2003.
10. H. Namatsu, T. Yamaguchi, M. Nagase, K. Yamasaki, and K. Kurihara, "Nano-patterning of a hydrogen silsesquioxane resist with reduced linewidth fluctuations,"Microelectron. Eng., vol. 41-42, pp. 331-334, 1998.
11. A. Verevkin, J. Zhang, R. Sobolewski, A. Lipatov, O. Okunev, G. Chulkova, A. Korneev, K. Smirnov, G. N. Gol'tsman, and A. Semenov, "Detection efficiency of large-active-area NbN single-photon superconducting detectors in the ultraviolet to near-infrared range,"Appl. Phys. Lett., vol. 80, pp. 4687-4689, 2002.