Fabrication of nanostructured superconducting single-photon detectors

IEEE Transactions on Applied Superconductivity

Volumn 13, Issue 2 I, 2003, Pages 192-195

  Gol'tsman, G N ^a   Smirnov, K ^a   Kouminov, P ^a   Voronov, B ^a   Kaurova, N ^a   Drakinsky, V ^a   Zhang, J ^b   Verevkin, A ^b   Sobolewski, Roman ^b,c  

^a MOSCOW STATE PEDAGOGICAL UNIVERSITY   (Russian Federation)

^b University of Rochester   (United States)

^c INSTITUTE OF PHYSICS   (Poland)

Author keywords

Electron beam lithography; Reactive ion etching; Single photon detection; Superconducting ultrathin NbN films

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; PHOTODETECTORS; REACTIVE ION ETCHING; ULTRATHIN FILMS;

SINGLE-PHOTON DETECTION;

SUPERCONDUCTING DEVICES;

EID: 0042442478     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2003.813678     Document Type: Conference Paper

References (12)

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