A fast turn-around time process for fabrication of qubit circuits

IEEE Transactions on Applied Superconductivity

Volumn 15, Issue 2 PART I, 2005, Pages 117-120

  Patel, Vijay ^a   Chen, Wei ^a   Pottorf, Shawn ^a   Lukens, James E ^a  

^a STONY BROOK UNIVERSITY   (United States)

Author keywords

1 f noise; Device fabrication; Josephson junctions; Quantum computation; Self aligned; Sub gap resistance; Submicron junctions

Indexed keywords

ALUMINUM COMPOUNDS; ELECTRON BEAM LITHOGRAPHY; FABRICATION; INTEGRATED CIRCUITS; MICROWAVE FILTERS; NIOBIUM; QUANTUM THEORY; SPURIOUS SIGNAL NOISE; THERMOOXIDATION; TURNAROUND TIME;

1/F NOISE; DEVICE FABRICATION; JOSEPHSON JUNCTIONS; OPTICAL EMISSION SPECTRA; QUANTUM COMPUTATION; QUBIT CIRCUITS; SELF-ALIGNED; SUB-GAP RESISTANCE; SUBMICRON JUNCTIONS;

JOSEPHSON JUNCTION DEVICES;

EID: 22044434434     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2005.849708     Document Type: Conference Paper

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