Fabrication of high-quality Josephson junctions for quantum computation using a self-aligned process

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 767-772

  Chen, Wei ^a   Patel, Vijay ^a   Lukens, J E ^a  

^a STONY BROOK UNIVERSITY   (United States)

Author keywords

Josephson junctions; Junction fabrication; Quantum computing; Superconducting qubit

Indexed keywords

DATA MINING; ELECTRON BEAM LITHOGRAPHY; JOSEPHSON JUNCTION DEVICES; NANOTECHNOLOGY; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PHOTOLITHOGRAPHY; QUARTZ DEPOSITS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR QUANTUM DOTS; TRANSISTORS;

JUNCTION FABRICATION; QUANTUM COMPUTERS; QUANTUM COMPUTING; SUPERCONDUCTING QUBIT;

QUANTUM ELECTRONICS;

EID: 2542448609     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00218-7     Document Type: Conference Paper

References (7)

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7. S. Pottorf, unpublished data.