Self-shunted Nb/AlOx/Nb josephson junctions

IEEE Transactions on Applied Superconductivity

Volumn 9, Issue 2 PART 3, 1999, Pages 3247-3250

  Patel, Vijay ^a   Lukens, J E ^a  

^a STONY BROOK UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL CURRENT DENSITY (SUPERCONDUCTIVITY); ELECTRODES; ELECTRON BEAM LITHOGRAPHY; INTEGRATED CIRCUIT MANUFACTURE; MAGNETIC HYSTERESIS; MASKS; NIOBIUM COMPOUNDS; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING;

DEEP SUBMICRON DIMENSIONS; QUARTZ ETCH MASKS;

JOSEPHSON JUNCTION DEVICES;

EID: 0032681387     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/77.783721     Document Type: Article

References (20)

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