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Volumn 73, Issue 19, 1998, Pages 2832-2834
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Combined millimeter-wave near-field microscope and capacitance distance control for the quantitative mapping of sheet resistance of conducting layers
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 21944445641
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.122605 Document Type: Article |
Times cited : (47)
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References (16)
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