Current stress metastability in a-Si:H thin film transistors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5578, Issue PART 1, 2004, Pages 343-352

  Sultana, Afrin ^a   Sakariya, Kapil ^a   Nathan, Arokia ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

a Si:H thin film transistor; Current stress; Threshold voltage shift

Indexed keywords

AMORPHOUS MATERIALS; ELECTRIC POTENTIAL; HYDROGEN; MATHEMATICAL MODELS; SILICON; SILICON NITRIDE; STRESS ANALYSIS;

A-SI:H THIN FILM TRANSISTOR; CURRENT STRESS; METASTABLE DEFECTS; THRESHOLD VOLTAGE SHIFT;

THIN FILM TRANSISTORS;

EID: 21944431667     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.605363     Document Type: Conference Paper

References (12)

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