Size effect on fracture of MEMS materials

Journal of Materials Science and Technology

Volumn 21, Issue SUPPL. 1, 2005, Pages 47-50

  Hu, Xiaozhi ^a   Duan, Kai ^a  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

Fracture toughness; Polysilicon; Silicon; Size effect; Weibull strength distribution

Indexed keywords

FRACTURE TOUGHNESS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; STRENGTH OF MATERIALS; WEIBULL DISTRIBUTION;

SIMPLE FLAW STATISTICS MODEL; SIZE EFFECT; WEIBULL STRENGTH DISTRIBUTION;

SILICON;

EID: 21844475653     PISSN: 10050302     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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