Surface morphology and sub-surface damaged layer of various glasses machined by 193 nm ArF excimer laser

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5715, Issue , 2005, Pages 110-117

  Liao, Yunn Shiuan ^a   Chen, Ying Tung ^a   Chao, Choung Lii ^b   Liu, Yih Ming ^c  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b TAMKANG UNIVERSITY   (Taiwan)

^c NATIONAL DEFENSE UNIVERSITY   (Taiwan)

Author keywords

ArF Excimer laser; Glasses; Sub Surface Damaged

Indexed keywords

ARGON; CRACK INITIATION; DEBRIS; ETCHING; EXCIMER LASERS; LASER ABLATION; MORPHOLOGY; THERMAL STRESS;

ARF EXCIMER LASER; HIGH ENERGY DENSITY; PHOTOTHERMAL EFFECTS; SUB-SURFACE DAMAGED (SSD);

GLASS;

EID: 21844445113     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.592034     Document Type: Conference Paper

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