Precision shaping of transparent materials for optical devices with VUV laser radiation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5399, Issue , 2004, Pages 107-114

  Temme, Thorsten ^a   Ostendorf, Andreas ^a   Kulik, Christian ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

F2 excimer laser; Fused silica machining; Micro optics; Micromachining

Indexed keywords

DIFFRACTION GRATINGS; EXCIMER LASERS; FUSED SILICA; LIGHT TRANSMISSION; MICROMACHINING; MICROOPTICS; PACKAGING; ROTATION; TRANSPARENCY; ULTRAVIOLET RADIATION;

BULK MATERIALS; F2 EXCIMER LASERS; FUSED SILICA MACHINING; TRANSMISSION GRATINGS;

OPTICAL DEVICES;

EID: 2442557898     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.552744     Document Type: Conference Paper

References (11)

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