All-silicon standing-wave microspectrometer with spectral resolution

2003 IEEE/LEOS International Conference on Optical MEMS

Volumn , Issue , 2003, Pages 26-27

  Bhalotra, S R ^a   Kung, H L ^a   Knipp, D ^b   Stiebig, H ^c   Miller, D A B ^a  

^a STANFORD UNIVERSITY   (United States)

^b JACOBS UNIVERSITY BREMEN   (Germany)

^c FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Detectors; Micromirrors; Mirrors; Optical sensors; Optical tuning; Photodetectors; Resonance; Resonant frequency; Spectroscopy; Voltage

Indexed keywords

DETECTORS; ELECTRIC POTENTIAL; MIRRORS; MOEMS; NATURAL FREQUENCIES; OPTICAL SENSORS; PHOTODETECTORS; PHOTONS; RESONANCE; SPECTROMETERS; SPECTROSCOPY;

DEVICE SENSITIVITY; MECHANICAL RESONANCE FREQUENCY; MICRO MIRROR; OPERATING REQUIREMENTS; OPTICAL STANDING WAVE; OPTICAL TUNING; REAL-TIME OPTIMIZATION; REFLECTIVE MIRRORS;

ELASTIC WAVES;

EID: 84946211591     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2003.1233450     Document Type: Conference Paper

References (3)

1. J. R. Leger and J. J. Talghader, IEEE/LEOS 15th Annual Meeting, ThL3 (2002).
2. H. L. Kung, S. R. Bhalotra, J. D. Mansell, D. A. B. Miller, and J. S. Harris Jr., J. Sel. Topics in Quant. Electron., 8, 98 (2002).
3. D. Knipp, H. Stiebig, S. R. Bhalotra, H. L. Kung, D. A. B. Miller, SPIE Photonics West, 4983-15 (2003).