Improved model for the analysis of FTIR transmission spectra from multilayer HgCdTe structures

Journal of Electronic Materials

Volumn 34, Issue 6, 2005, Pages 762-767

  Daraselia, M ^a   Carmody, M ^a   Edwall, D D ^a   Tiwald, T E ^b  

^a ROCKWELL SCIENTIFIC COMPANY   (United States)

^b J A WOOLLAM CO INC   (United States)

Author keywords

Dielectric function; FTIR; Multilayer structure model; Refractive index dispersion; Spectroscopic ellipsometry (SE); Transmission

Indexed keywords

ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MATHEMATICAL MODELS; REFRACTIVE INDEX; SEMICONDUCTOR GROWTH; THICKNESS MEASUREMENT;

HG1-XCDXTE (MCT); MMULTILAYER STRUCTURE MODEL; REFRACTIVE INDEX DISPERSION; SPECTROSCOPIC ELLIPSOMETRY (SE);

SEMICONDUCTOR MATERIALS;

EID: 21644482953     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-005-0017-5     Document Type: Conference Paper

References (15)

1. M. Daraselia, M. Carmody, M. Zandian, and J.M. Arias, J. Electron. Mater. 33, 761 (2004).
2. R.M. Azzam and N.M. Bashara, Ellipsometry and Polarized Light (Amsterdam: North-Holland, 1977), pp. 359-363.
3. P.G. Snyder, J.A. Woollam, S.A. Alterovitz, and B. Johs, J. Appl. Phys. 68, 5925 (1990).
4. M. Daraselia, C.H. Grein, S. Rujirawat, B. Yang, S. Sivanathan, F. Aqariden, and H. D. Shih, J. Electron. Mater. 28, 743 (1999).
5. W.H. Press, B.P. Flannery, S.A. Teukolsky, and W.T. Vetterling, Numerical Recipes in C (Cambridge, United Kingdom: Cambridge University Press, 1992), pp. 572-580.
6. J.A. Woollam Co. Inc., Lincoln, NE 68508.
7. T.E. Tiwald, D.W. Thompson, J.A. Woollam, W. Paulson, and R. Hance, Thin Solid Films 313-314, 661 (1998).
8. B. Johs, C.M. Herzinger, J.H. Dinan, A. Cornfeld, and J.D. Benson, Thin Solid Films 313-314, 137 (1998).
9. G.L. Hansen, J.L. Schmidt, and T.N. Casselman, J. Appl. Phys. 53, 7099 (1982).
10. E. Finkman and Y. Nemirovsky, J. Appl. Phys. 50, 4356 (1979).
11. E. Finkman and S.E. Schacham, J. Appl. Phys. 56, 2896 (1984).
12. S. E. Schacham and E. Finkman, J. Appl. Phys. 57, 2001 (1985).
13. K. Moazzami, D. Liao, J.D. Phillips, D.L. Lee, M. Carmody, M. Zandian, and D.D. Edwall, J. Electron. Mater. 32, 646 (2003).
14. J. Bajaj, J.M. Arias, M. Zandian, J.C. Pasko, L.J. Kozlovski, R.E. DeWames, and W.E. Tennant, J. Electron. Mater. 24, 1067 (1995).
15. WE. Tennant, M. Thomas, L.J. Kozlovski, W.V. McLevige, D.D. Edwall, M. Zandian, K. Spariosu, G. Hindelbrandt, V. Gil, P. Ely, M. Muzilla, A. Stoltz, and J.H. Dinan, J. Electron. Mater. 30, 590 (2001).