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Materials Science and Engineering: A

Volumn 400-401, Issue 1-2 SUPPL., 2005, Pages 435-438

Dislocation modeling for the microelectronics industry

(2) Schwarz, K W a Chidambarrao, D b

a IBM T J WATSON RESEARCH CENTER (United States)

b IBM (United States)

Author keywords

Dislocations; Microelectronics; Modeling

Indexed keywords

DISLOCATIONS (CRYSTALS); NUCLEATION; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES; STRESS ANALYSIS; STRESS CONCENTRATION;

DISLOCATION MODELING; DISLOCATION NUCLEATION; LARGE-SCALE SIMULATIONS; MEMORY CELLS;

MICROELECTRONICS;

DISLOCATION (METALLURGY);

EID: 21644470519 PISSN: 09215093 EISSN: None Source Type: Journal
DOI: 10.1016/j.msea.2005.01.070 Document Type: Article

Times cited : (8)

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