Comparison of large-scale layer-relaxation simulations with experiment

Applied Physics Letters

Volumn 85, Issue 12, 2004, Pages 2238-2240

  Schwarz, K W ^a   Cai, J ^a   Mooney, P M ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC STRAIN; ROOM TEMPERATURE; SIGE; STRAIN RELAXATION; THREADING DISLOCATION;

ANNEALING; APPROXIMATION THEORY; BOUNDARY CONDITIONS; COMPUTER SIMULATION; DISLOCATIONS (CRYSTALS); LATTICE CONSTANTS; NUCLEATION; PLASTIC DEFORMATION; RELAXATION PROCESSES; STRAIN; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

SILICON COMPOUNDS;

EID: 7044254797     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1791332     Document Type: Article

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