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Volumn 97, Issue 12, 2005, Pages

Breakdown of ultrathin native oxide films at contact interfaces of electromechanically stressed silicon microdevices

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT INTERFACES; SILICON MICRODEVICES; SILICON OXIDE FILMS; ULTRATHIN NATIVE OXIDE FILMS;

ELECTRIC BREAKDOWN; ELECTRIC POTENTIAL; ELECTROMECHANICAL DEVICES; INTERFACES (MATERIALS); POLYSILICON; SEMICONDUCTOR DEVICES; STRESSES;

ULTRATHIN FILMS;

EID: 21644469716 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1941467 Document Type: Article

Times cited : (8)

References (16)

1
- 0033731352
- R. Degraeve, B. Kaczer, and G. Groeseneken, Microelectron. Reliab. 40, 697 (2000).
- (2000) Microelectron. Reliab. , vol.40 , pp. 697
- Degraeve, R.¹ Kaczer, B.² Groeseneken, G.³

2
- 21544458715
- D. J. DiMaria, E. Cartier, and D. Arnold, J. Appl. Phys. 73, 3367 (1993).
- (1993) J. Appl. Phys. , vol.73 , pp. 3367
- Dimaria, D.J.¹ Cartier, E.² Arnold, D.³

3
- 0030192752
- M. Nafría, J. Suñ́, and X. Aymerich, Microelectron. Reliab. 36, 871 (1996).
- (1996) Microelectron. Reliab. , vol.36 , pp. 871
- Nafría, M.¹ Suñ́, J.² Aymerich, X.³

4
- 0033319253
- R. Degraeve, B. Kaczer, and G. Groeseneken, Microelectron. Reliab. 39, 1445 (1999).
- (1999) Microelectron. Reliab. , vol.39 , pp. 1445
- Degraeve, R.¹ Kaczer, B.² Groeseneken, G.³

5
- 85058724126
- E. Miranda and J. Suñ́, Microelectron. Reliab. 44, 1 (2004).
- (2004) Microelectron. Reliab. , vol.44 , pp. 1
- Miranda, E.¹ Suñ́, J.²

6
- 0035801799
- W. B. Ying, Y. Mizokawa, Y. Kamiura, K. Kawamoto, and W. Y. Yang, Appl. Surf. Sci. 181, 1 (2001).
- (2001) Appl. Surf. Sci. , vol.181 , pp. 1
- Ying, W.B.¹ Mizokawa, Y.² Kamiura, Y.³ Kawamoto, K.⁴ Yang, W.Y.⁵

7
- 0344206766
- L. Weber, M. Lehr, and E. Gmelin, Phys. Rev. B 43, 4317 (1991).
- (1991) Phys. Rev. B , vol.43 , pp. 4317
- Weber, L.¹ Lehr, M.² Gmelin, E.³

8
- 10944272047
- A. Lumbantobing, L. Kogut, and K. Komvopoulos, J. Microelectromech. Syst. 13, 977 (2004).
- (2004) J. Microelectromech. Syst. , vol.13 , pp. 977
- Lumbantobing, A.¹ Kogut, L.² Komvopoulos, K.³

9
- 21644435376
- Technical Digest, Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, 6-10 June
- L. Kogut, A. Lumbantobing, and K. Komvopoulos, in Technical Digest, Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, 6-10 June, 2004, p. 310.
- (2004) , pp. 310
- Kogut, L.¹ Lumbantobing, A.² Komvopoulos, K.³

10
- 3042772801
- L. Kogut and K. Komvopoulos, Appl. Phys. Lett. 84, 4842 (2004).
- (2004) Appl. Phys. Lett. , vol.84 , pp. 4842
- Kogut, L.¹ Komvopoulos, K.²

11
- 0038680506
- J. W. Tringe, T. A. Uhlman, A. C. Oliver, and J. E. Houston, J. Appl. Phys. 93, 4661 (2003).
- (2003) J. Appl. Phys. , vol.93 , pp. 4661
- Tringe, J.W.¹ Uhlman, T.A.² Oliver, A.C.³ Houston, J.E.⁴

12
- 0030562473
- L. Weber, M. Lehr, and E. Gmelin, Physica B 217, 181 (1996).
- (1996) Physica B , vol.217 , pp. 181
- Weber, L.¹ Lehr, M.² Gmelin, E.³

13
- 0742320701
- L. Kogut and K. Komvopoulos, J. Appl. Phys. 95, 576 (2004).
- (2004) J. Appl. Phys. , vol.95 , pp. 576
- Kogut, L.¹ Komvopoulos, K.²

14
- 0035336463
- C. G. Karagiannopoulos, C. S. Psomopoulos, and P. D. Bourkas, Modell. Simul. Mater. Sci. Eng. 9, 181 (2001).
- (2001) Modell. Simul. Mater. Sci. Eng. , vol.9 , pp. 181
- Karagiannopoulos, C.G.¹ Psomopoulos, C.S.² Bourkas, P.D.³

15
- 0141522752
- L. Kogut and K. Komvopoulos, J. Appl. Phys. 94, 3153 (2003).
- (2003) J. Appl. Phys. , vol.94 , pp. 3153
- Kogut, L.¹ Komvopoulos, K.²

16
- 0036600512
- B. McCarthy, G. G. Adams, N. E. McGruer, and D. Potter, J. Microelectromech. Syst. 11, 276 (2002).
- (2002) J. Microelectromech. Syst. , vol.11 , pp. 276
- McCarthy, B.¹ Adams, G.G.² McGruer, N.E.³ Potter, D.⁴

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