SCOPUS 정보 검색 플랫폼

IEE Colloquium (Digest)

Volumn , Issue 32, 2000, Pages 1-6

Surface tension powered self-assembly of 3D MOEMS devices using DRIE of bonded silicon-on-insulator wafers

(3) Syms, R R A a Gormley, C b Blackstone, S b

a IMPERIAL COLLEGE LONDON (United Kingdom)

b BCO Technologies (NI) Ltd (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DRIVES; MELTABLE PARTS; MICRO-OPTICAL ELECTRO-MECHANICAL SYSTEMS (MOEMS); SILICON SUBSTRATES;

ADHESION; ELECTROSTATICS; INDUCTIVELY COUPLED PLASMA; PHOTOLITHOGRAPHY; PHOTORESISTS; REACTIVE ION ETCHING; SELF ASSEMBLY; SILICON ON INSULATOR TECHNOLOGY; SURFACE TENSION;

MICROELECTROMECHANICAL DEVICES;

EID: 6344283088 PISSN: 09633308 EISSN: None Source Type: Journal
DOI: None Document Type: Conference Paper

Times cited : (5)

References (8)

1
- 0027582948
- Self-assembly of fully three-dimensional microstructures using rotation by surface tension forces
- Syms R.R.A., Yeatman E.M. "Self-assembly of fully three-dimensional microstructures using rotation by surface tension forces" Elect. Lett. 29, 662-664 (1993)
- (1993) Elect. Lett. , vol.29 , pp. 662-664
- Syms, R.R.A.¹ Yeatman, E.M.²

2
- 4043154419
- 3-D self-assembly of optomechanical structures using bonded SOI
- Honolulu, Hawaii, Oct. 17-22, paper 1026
- Syms R.R.A., Blackstone S. "3-D self-assembly of optomechanical structures using bonded SOI" 1999 Annual Meeting of the Electrochemical Society, Honolulu, Hawaii, Oct. 17-22, paper 1026 (1999)
- (1999) 1999 Annual Meeting of the Electrochemical Society
- Syms, R.R.A.¹ Blackstone, S.²

3
- 0033309887
- Surface tension powered self-assembly of 3-D micro-optomechanical structures
- Syms R.R.A. "Surface tension powered self-assembly of 3-D micro-optomechanical structures" IEEE/ASME J. Microelectromech. Syst. 8, 448-455 (1999)
- (1999) IEEE/ASME J. Microelectromech. Syst. , vol.8 , pp. 448-455
- Syms, R.R.A.¹

4
- 0029350934
- Micromachined free-space integrated micro-optics
- Wu M.C., Lin L.-Y., Lee S.-S., Pister K.S.J. "Micromachined free-space integrated micro-optics" Sensors and Actuators A50, 127-134 (1995)
- (1995) Sensors and Actuators , vol.A50 , pp. 127-134
- Wu, M.C.¹ Lin, L.-Y.² Lee, S.-S.³ Pister, K.S.J.⁴

5
- 0030100426
- Surface micromachined mirrors for laser-beam positioning
- Tien N.C., Solgaard O., Kiang M.H., Daneman M., Lau K.Y., Muller R.S. "Surface micromachined mirrors for laser-beam positioning" Sensors and Actuators A52, 76-80 (1996)
- (1996) Sensors and Actuators , vol.A52 , pp. 76-80
- Tien, N.C.¹ Solgaard, O.² Kiang, M.H.³ Daneman, M.⁴ Lau, K.Y.⁵ Muller, R.S.⁶

6
- 0030381609
- Micromachined polysilicon microscanners for barcode readers
- Kiang M.-H., Solgaard O., Muller R.S., Lau K.Y. "Micromachined polysilicon microscanners for barcode readers" IEEE Photon. Tech. Lett. 8, 95-97 (1996)
- (1996) IEEE Photon. Tech. Lett. , vol.8 , pp. 95-97
- Kiang, M.-H.¹ Solgaard, O.² Muller, R.S.³ Lau, K.Y.⁴

7
- 0003370080
- Scanning and rotating micromirrors using thermal actuators
- Butler J.T., Bright V.M., Reid J.R. "Scanning and rotating micromirrors using thermal actuators" Proc. SPIE 3131, 134-144 (1997)
- (1997) Proc. SPIE , vol.3131 , pp. 134-144
- Butler, J.T.¹ Bright, V.M.² Reid, J.R.³

8
- 0030269684
- Out-of-plane refractive microlens fabricated by surface micromachining
- King C.R., Lin L.Y., Wu M.C. "Out-of-plane refractive microlens fabricated by surface micromachining" IEEE Photon. Tech. Lett. 8, 1349-1351 (1996)
- (1996) IEEE Photon. Tech. Lett. , vol.8 , pp. 1349-1351
- King, C.R.¹ Lin, L.Y.² Wu, M.C.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.