Effective minimization of charge trapping in high-K gate dielectrics with an ultra-short pulse technique

International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT

Volumn 1, Issue , 2004, Pages 407-410

  Zhao, Yuegang ^a   Young, Chadwin D ^b   Pendley, Michael ^b   Matthews, Kenneth ^b   Lee, Byoung Hun ^b,c   Brown, George A ^b  

^a Keithley Instruments Inc   (United States)

^b International SEMATECH ^*  (United States)

^c IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE TRAPPING; DIGITAL OSCILLOSCOPE; HIGH-Κ GATE DIELECTRICS; SELF-HEATING EFFECT;

BANDWIDTH; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CONNECTORS; MOSFET DEVICES; PULSE GENERATORS; ULTRASHORT PULSES;

DIELECTRIC MATERIALS;

EID: 21644433282     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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8. C.D. Young, et al., IRPS, p. 597, March (2004).
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10. C. Young, et al., submitted to SSDM (2004).
11. K. A. Jenkins, et al., IEEE TED, vol. 44, p.1923 (1997).