Simulations of heat transport during transient electrostatic discharge events in a sub-micron transistor

Proceedings of the ASME Heat Transfer/Fluids Engineering Summer Conference 2004, HT/FED 2004

Volumn 4, Issue , 2004, Pages 347-359

  Narumanchi, Sreekant V J ^a   Murthy, Jayathi Y ^b   Amon, Cristina H ^c  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b PURDUE UNIVERSITY   (United States)

^c CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIFFUSION; ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; ELECTROSTATICS; FOURIER TRANSFORMS; HYDRODYNAMICS; MATHEMATICAL MODELS; PHONONS; SEMICONDUCTING SILICON; THERMAL EFFECTS; TRANSIENTS; TRANSISTORS;

BOLTZMANN TRANSPORT EQUATION (BTE); ENERGY INTERACTIONS; HUMAN BODY MODELS (HBM); HYDRODYNAMIC EQUATIONS;

HEAT TRANSFER;

EID: 21544447253     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/ht-fed2004-56252     Document Type: Conference Paper

References (30)

1. Cahill, D.G., Ford, W.K., Goodson, K.E., Mahan, G.D., Majumdar, A., Maris, H.J., Merlin, R., and Phillpot, S.R., 2003, "Nanoscale Thermal Transport", Journal of Applied Physics, 93(2), pp. 793-818.
2. Majumdar, A., 1993, "Microscale Heat Conduction in Dielectric Thin Films", ASME Journal of Heat Transfer, 115, pp. 7-16.
3. Joshi, A.A. and Majumdar, A., 1993, "Transient Ballistic and Diffusive Phonon Transport in Thin Films", Journal of Applied Physics, 74(1), pp. 31-39.
4. Chen, G., 1997, "Size and Interface Effects on Thermal Conductivity of Superlattices and Periodic Thin-Film Structures", Journal of Heat Transfer, 119, pp. 220-229.
5. Chen, G., 1998, "Thermal Conductivity and Ballistic-Phonon Transport in the Cross-Plane Direction of Superlattices", Physical Review B, 57(23), pp. 14958-14973.
6. Asheghi, M., Touzelbaev, M.N., Goodson, K.E., Leung, Y.K., and Wong, S.S., 1998, "Temperature-Dependent Thermal Conductivity of Single-Crystal Silicon Layers in SOI Substrates", Journal of Heat Transfer, 120, pp. 30-36.
7. Asheghi, M., Kurabayashi, K., Kasnavi, R., and Goodson, K.E., 2002, "Thermal Conduction in Doped Single-Crystal Silicon Films", Journal of Applied Physics, 91(8), pp. 5079-5088.
8. Ju, Y.S. and Goodson, K.E., 1999, "Phonon Scattering in Silicon Thin Films with Thickness of Order 100 nm" Applied Physics Letters, 74(20), pp. 3305-3307.
9. Cahill, D.G., Goodson, K.E., and Majumdar, A., 2002, "Thermometry and Thermal Transport in Micro/Nanoscale Solid-State Devices and Structures", ASME Journal of Heat Transfer, 124, pp. 223-241.
10. Ju, Y.S., 1999, "Microscale Heat Conduction in Integrated Circuits and Their Constituent Films", Ph.D. thesis, Department of Mechanical Engineering, Stanford University.
11. Sverdrup, P.G., 2000, "Simulation and Thermometry of Sub-Continuum Heat Transport in Semiconductor Devices", Ph.D. thesis, Department of Mechanical Engineering, Stanford University.
12. Sverdrup, P.O., Ju, Y.S., and Goodson, K.E., 2001, "Sub-Continuum Simulations of Heat Conduction in Silicon-on-Insulator Transistors", ASME Journal of Heat Transfer, 123, pp. 130-137.
13. Armstrong, B.H., 1981, "Two-Fluid Theory of Thermal Conductivity of Dielectric Crystals", Physical Review B, 23(2), pp. 883-899.
14. Majumdar, A., Fushinobu, K., and Hijikata, K., 1995, "Effect of Gate Voltage on Hot-Electron and Hot-Phonon Interaction and Transport in a Submicrometer Transistor", Journal of Applied Physics, 77(12), pp. 6686-6694.
15. Fushinobu, K., Hijikata, K., and Majumdar, A., 1995, "Heat Generation in Sub-Micron GaAs MESFETs", Proceedings - International Intersociety Electronic Packaging Conference EEP-Vol. 10-2, Advances in Electronic Packaging, pp. 897-902.
16. Fushinobu, K., Majumdar, A., and Hijikata, K., 1995, "Heat Generation and Transport in Submicron Semiconductor Devices", ASME Journal of Heat Transfer, 117, pp. 25-31.
17. Lai, J. and Majumdar, A., 1996, "Concurrent Thermal and Electrical Modeling of Sub-Micrometer Silicon Devices", Journal of Applied Physics, 79(9), pp. 7353-7361.
18. Mazumder, S. and Majumdar, A., 2001, "Monte Carlo Study of Phonon Transport in Solid Thin Films Including Dispersion and Polarization", ASME Journal of Heat Transfer, 123, pp. 749-759.
19. Narumanchi, S.V.J., Murthy, J.Y., and Amon, C.H., 2003, "Computations of Sub-Micron Heat Transport in Silicon Accounting for Phonon Dispersion", ASME Summer Heat Transfer Conference, Paper No. HT2003-47490, Las Vegas, NV.
20. Narumanchi, S. V.J., Murthy, J.Y., and Amon, C.H., 2003, "Simulations of Heat Conduction in Sub-Micron Silicon-on-Insulator Transistors Accounting for Phonon Dispersion and Polarization", ASME International Mechanical Engineering Congress and Exposition, Paper No. IMECE2003-42447, Washington, DC.
21. Touloukian, Y.S. and Buyco, E.H., 1970, Thermal Conductivity: Nonmetallic Solids, in Thermophysical Properties of Matter, 1970, IFI/Plenum, New York.
22. Holland, M.G., 1963, "Analysis of Lattice Thermal Conductivity", Physical Review, 132(6), pp. 2461-2471.
23. Narumanchi, S. V.J., Murthy, J.Y., and Amon, C.H., 2003, "Simulation of Unsteady Small Heat Source Effects in Sub-Micron Heat Conduction", ASME Journal of Heat Transfer, 125(5), pp. 896-903.
24. Patankar, S.V., 1980, Numerical Heat Transfer and Fluid Flow, Taylor and Francis.
25. Chai, J.C., Lee, H.S., and Patankar, S.V., 1994, "Finite Volume Method for Radiation Heat Transfer", Journal of Thermophysics and Heat Transfer, 8(3), pp. 419-425.
26. Murthy, J.Y. and Mathur, S.R., 1998, "Finite Volume Method for Radiative Heat Transfer Using Unstructured Meshes", Journal of Thermophysics and Heat Transfer, 12(3), pp. 313-321.
27. Gaskell, P.H. and Lau, A.K.C, 1988, "Curvature-Compensated Convective Transport: Smart, a New Boundedness-Preserving Transport Algorithm", International Journal for Numerical Methods in Fluids, 8, pp. 617-641.
28. Darwish, M.S. and Moukalled, F.H., 1994, "Normalized Variable and Space Formulation Methodology for High-Resolution Schemes", Numerical Heat Transfer, Part B, 26, pp. 79-96.
29. Duncan, A., Ravaioli, U., and Jakumeit, J., 1998, "Full-Band Monte Carlo Investigation of Carrier Trends in the Scaling of Metal-Oxide Semiconductor Field-Effect Transistors", IEEE Transactions on Electron Devices, 45, pp. 867-876.
30. Pop, E., Sinha, S., and Goodson, K.E., 2003, "Detailed Phonon Generation Simulations Via the Monte Carlo Method", Proceedings - ASME Summer Heat Transfer Conference, Paper No. HT2003-47312, Las Vegas, NV.