Vibroacoustic effects in MEMS

Sound and Vibration

Volumn 37, Issue 9, 2003, Pages 22-26

  Vinokur, Roman ^a  

^a Wieland Associates Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DAMPING; GRAPH THEORY; MICROSENSORS; STICTION; ULTRASONIC TRANSDUCERS; VIBRATIONS (MECHANICAL);

ELECTROSTATIC CAPACITIVE MICROSENSORS; VIBROACOUSTIC EFFECTS;

MICROELECTROMECHANICAL DEVICES;

EID: 0242273242     PISSN: 15410161     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (9)

1. Hunt, F. V., Electroacoustics, Acoustical Society of America. 1954.
2. Nathanson, H. C., Newell, W. E., Wickstrom, R. A., and Davis, J. R., "The Resonant Gate Transistor", IEEE Tran. On Elec. Dev., 14 (3), 117-133, 1967.
3. Vinokur, R. Y., "Feasible Analytical Solutions for Electrostatic Parallel-Plate Actuator or Sensor," Journal of Vibration and Control, to be published in 2003.
4. Langlois, W. E., "Isothermal Squeeze Films," Quarterly Applied Mathematics, 20 (2), 131-150, 1962.
5. Blech, J. J., "On Isothermal Squeeze Films," Journal of Lubrication Technology, 105 (Oct), 615-620, 1983.
6. Morse, P. M., Vibration and Sound, Acoustical Society of America, USA, 1981.
7. Krylov, V. V., "Investigation of Environmental Low-Frequency Noise," Applied Acoustics, 51(1), pp. 33-51, 1997.
8. "The 'Hum' is Back," Echoes (edited by T. Rossing), 12 (3), p.5, 2002.
9. Vinokur, R. Y., "Infrasonic Sound Pressure in Dwellings at the Helmholtz Resonance Actuated by Environmental Noise and Vibration," Applied Acoustics, to be published in 2003.