Measurements of absolute total and partial cross sections for the electron ionization of tungsten hexafluoride (WF6)

International Journal of Mass Spectrometry

Volumn 233, Issue 1-3, 2004, Pages 25-31

  Basner, R ^a   Schmidt, M ^a   Becker, K ^b  

^a UNIVERSITY OF GREIFSWALD   (Germany)

^b Stevens Institute of Technology   (United States)

Author keywords

Cross sections; Electron ionization; Plasma processing; Tungsten hexafluoride

Indexed keywords

FLUORIDE; TUNGSTEN;

ARTICLE; ELECTRICITY; ELECTRON; IONIZATION; MATHEMATICAL COMPUTING; MEASUREMENT; TIME OF FLIGHT MASS SPECTROMETRY;

EID: 2142645017     PISSN: 13873806     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijms.2003.10.014     Document Type: Article

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