Absolute total and partial cross-sections for the electron impact ionization of TiCl4

Thin Solid Films

Volumn 374, Issue 2, 2000, Pages 291-297

  Basner, R ^a   Schmidt, M ^a   Becker, K ^b   Tarnovsky, V ^b   Deutsch, H ^c  

^a Inst F Niedertemperatur P   (Germany)

^b Stevens Institute of Technology   (United States)

^c UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON TRANSITIONS; IONIZATION OF SOLIDS; LIGHT REFLECTION; MASS SPECTROMETERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REACTION KINETICS; TITANIUM COMPOUNDS;

ELECTRON IMPACT IONIZATION; TITANIUM TETRACHLORIDE;

PROTECTIVE COATINGS;

EID: 0034291833     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01143-3     Document Type: Article

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