Visualizing acoustic displacements of capacitive micromachined transducers using an interferometric microscope

Acoustic Research Letters Online

Volumn 6, Issue 2, 2005, Pages 75-79

  Davis, L A J ^a   Billson, D R ^a   Hutchins, D A ^a   Noble, R A ^b  

^a UNIVERSITY OF WARWICK   (United Kingdom)

^b QINETIQ   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC NOISE; FREQUENCIES; INTERFEROMETRY; LIGHT EMITTING DIODES; LIGHT SOURCES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL SYSTEMS; PHASE SHIFT; PROFILOMETRY;

ACOUSTIC DISPLACEMENTS; OPTICAL PATH; PERIODIC EXCITATION; VERTICAL AXIS;

ACOUSTIC TRANSDUCERS;

EID: 21244465531     PISSN: 15297853     EISSN: None     Source Type: Journal    
DOI: 10.1121/1.1851391     Document Type: Article

References (7)

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