Contact resistance modeling and measurements of an electrostatically actuated micromechanical switch

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 341-346

  Majumder, Sumit ^a   McGruer, N E ^a   Zavracky, Paul M ^a   Morrison, Richard H ^a   Adams, George G ^a   Krim, Jacqueline ^a  

^a NORTHEASTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; ELECTRIC RELAYS; ELECTRIC RESISTANCE MEASUREMENT; ELECTROSTATIC DEVICES; GOLD PLATING; MICROMACHINING; THRESHOLD VOLTAGE;

CONTACT RESISTANCE; MICROMECHANICAL SWITCH;

MICROELECTROMECHANICAL DEVICES;

EID: 0032296788     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)