A high-performance accelerometer with a fifth-order sigma-delta modulator

Journal of Micromechanics and Microengineering

Volumn 15, Issue 7, 2005, Pages

  Dong, Yufeng ^a   Kraft, Michael ^a   Gollasch, Carsten ^a   Redman White, William ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; CHEMICAL BONDS; COMPUTER SIMULATION; DATA ACQUISITION; MICROMACHINING; MODULATORS; NATURAL FREQUENCIES; PRINTED CIRCUIT BOARDS; REACTIVE ION ETCHING; SENSORS;

ANODIC BONDING; ELECTRONIC GENERATORS; LOOP FILTER; SYSTEM LEVELS;

ELECTROMECHANICAL DEVICES;

EID: 21044457223     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/7/004     Document Type: Article

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