메뉴 건너뛰기




Volumn 11, Issue 4-5, 2005, Pages 331-334

Experimental study of NiFe and CoFe throughmask electrodeposition of high aspect ratio features

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; COBALT COMPOUNDS; CURRENT DENSITY; ELECTRODES; MASKS; NICKEL COMPOUNDS; PH EFFECTS; PHOTORESISTS; PROTECTIVE COATINGS; SILICON WAFERS; SWELLING;

EID: 21044435515     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0448-6     Document Type: Conference Paper
Times cited : (2)

References (13)
  • 1
    • 0000518739 scopus 로고    scopus 로고
    • LIGA technologies and applications
    • Hruby J (2001) LIGA technologies and applications. MRS Bull 26 (4):337
    • (2001) MRS Bull , vol.26 , Issue.4 , pp. 337
    • Hruby, J.1
  • 2
    • 0030703837 scopus 로고    scopus 로고
    • A path: From electroplating through lithographic masks in electronics to LIGA in MEMS
    • Romankiw LT (1997) A path: from electroplating through lithographic masks in electronics to LIGA in MEMS. Electrochimica Acta 42: 2985
    • (1997) Electrochimica Acta , vol.42 , pp. 2985
    • Romankiw, L.T.1
  • 3
    • 0033184242 scopus 로고    scopus 로고
    • Batch-fabricated microinductors with electroplated magnetically anisotropic and laminated alloy cores
    • Park JY; Han SH; Allen MG (1999) Batch-fabricated microinductors with electroplated magnetically anisotropic and laminated alloy cores. IEEE Trans Magnetics 35 (5/pt.3): 4291
    • (1999) IEEE Trans Magnetics , vol.35 , Issue.3-5 PT , pp. 4291
    • Park, J.Y.1    Han, S.H.2    Allen, M.G.3
  • 5
    • 0033121869 scopus 로고    scopus 로고
    • Micromachined magnetic actuators using electroplated permalloy
    • Chang L; Yong WY (1999) Micromachined magnetic actuators using electroplated permalloy. IEEE Trans Magnetics 35 (3/pt.2): 1976
    • (1999) IEEE Trans Magnetics , vol.35 , Issue.2-3 PT , pp. 1976
    • Chang, L.1    Yong, W.Y.2
  • 8
    • 0001002032 scopus 로고
    • Magnetically soft materials in data storage: Their properties and electrochemistry
    • Gerischer H, Tobias C W (eds), VCH, New York
    • Andricacos PC; Romankiw LT (1994) Magnetically soft materials in data storage: their properties and electrochemistry. In: Advances in electrochemical science and engineering, Gerischer H, Tobias C W (eds), vol. 3 VCH, New York, p 230
    • (1994) Advances in Electrochemical Science and Engineering , vol.3 , pp. 230
    • Andricacos, P.C.1    Romankiw, L.T.2
  • 10
    • 0032201862 scopus 로고    scopus 로고
    • Rotating cylinder hull cell study of anomolous codeposition of binary iron-group alloys
    • Zech N; Podlaha E; Landolt D (1998) Rotating cylinder hull cell study of anomolous codeposition of binary iron-group alloys. J Appl Electrochem 28: 1251
    • (1998) J Appl Electrochem , vol.28 , pp. 1251
    • Zech, N.1    Podlaha, E.2    Landolt, D.3
  • 13
    • 0036530979 scopus 로고    scopus 로고
    • Enhanced transport by acoustic streaming in deep trench-like cavities
    • Nilson RH; Griffiths S (2002) Enhanced transport by acoustic streaming in deep trench-like cavities. J Electrochem Soc 149: G286
    • (2002) J Electrochem Soc , vol.149
    • Nilson, R.H.1    Griffiths, S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.