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Surface and Coatings Technology

Volumn 198, Issue 1-3 SPEC. ISS., 2005, Pages 389-394

Stress and surface morphology of TiNiCu thin films: Effect of annealing temperature

(4) Fu, Yongqing a,b,c Du, Hejun a,b Zhang, Sam b Gu, YanWei b

a MASSACHUSETTS INSTITUTE OF TECHNOLOGY (United States)

b NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

c UNIVERSITY OF CAMBRIDGE (United Kingdom)

Author keywords

Annealing temperature; Surface morphology; TiNiCu thin films

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; CRYSTALLINE MATERIALS; MORPHOLOGY; PHASE TRANSITIONS; RESIDUAL STRESSES; SHAPE MEMORY EFFECT; SPUTTERING; THERMAL STRESS; TITANIUM COMPOUNDS;

CRYSTALLINE FORMS; CRYSTALLINE STRUCTURE; POSTSPUTTERING ANNEALING; THERMAL PROCESSING;

THIN FILMS;

SPUTTERING;

EID: 20844456303 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.10.107 Document Type: Article

Times cited : (21)

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