Optical-capacitance-transient spectroscopy study for deep levels in 4H-SiC epilayer grown by cold wall chemical vapor deposition

Materials Science Forum

Volumn 483-485, Issue , 2005, Pages 381-384

  Kato, M ^a,b   Tanaka, S ^a,b   Ichimura, M ^a,b   Arai, E ^a,b   Nakamura, S ^a,b   Kimoto, T ^a,b  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

Cold wall CVD; Configuration coordinate diagram; Deep level; Optical excitation energy; Optical capacitance transient spectroscopy

Indexed keywords

CAPACITANCE; CHEMICAL VAPOR DEPOSITION; EPILAYERS; ULTRAVIOLET VISIBLE SPECTROSCOPY;

COLD WALL CVD; CONFIGURATION COORDINATE DIAGRAM; OPTICAL EXCITATION ENERGY; OPTICAL-CAPACITANCE-TRANSIENT SPECTROSCOPY;

SILICON CARBIDE;

EID: 20744450281     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-963-6.381     Document Type: Conference Paper

References (12)

1. Y. Nakakura, M. Kato, M. Ichiramu, E. Arai, Y. Tokuda and S. Nishino, J. Appl. Phys. 94 (2003) 3233.
2. C. G. Hemmingsson, N. T. Son, A. Ellison, J. Zhang, and E. Janzén, Phys. Rev B 58 (1998) R10119.
3. T. Dalibor, G. Pensl, H. Matsunami, T. Kimoto, W. J. Choyke, A. Schöner and N. Nordell, Phys. Stat. Sol. (a) 162 (1997) 199.
4. A. Chantre, G. Vincent, and D. Bois, Phys. Rev. B 23 (1981) 5335.
5. C. G. Hemmingsson, N. T. Son, O. Kordina, J. P. Bergman, E. Janzén, J. L. Lindström, S. Savage and N. Nordell, J. Appl. Phys. 81 (1997) 6155.
6. M. Weidner, G. Pensl, H. Nagasawa, A. Schöner and T. Ohshima, Mat. Sci. Forum 457-460 (2004) 485.
7. R. K. Willardson and A. C. Beer, Semiconductors and semimetals (Academic Press, 1983) Chap. 1.
8. R. Pässler, H. Pettersson, H. G. Grimmeiss and K. Schmalz, Phys. Rev. B 55 (1997) 4312.
9. H. Kukimoto, C. H. Henry and F. R. Merritt, Phys. Rev. B 15 (1973) 2486.
10. D. V. Lang and R. A. Logan, Phys. Rev. B 19 (1979) 1015.
11. P. M. Mooney, J. Appl. Phys. 67 (1990) R1.
12. A. Kawasuso, F. Redmann, R. Krause-Rehberg, M. Weidner, T. Frank, G. Pensl, P. Sperr, W. Triftshäuser and H. Itoh, Appl. Phys. Lett. 79 (2001) 3950.