A high-corrugation-rate self-processing SiO2-ZrO2 hybrid sol-gel material for fabrication of microlens array

IEEE Photonics Technology Letters

Volumn 17, Issue 6, 2005, Pages 1223-1225

  He, Miao ^a   Yuan, Xiaocong ^a   Bu, Jing ^a   Tan, Chee Wee ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Microlens array; Self processing; Sol gel

Indexed keywords

ARRAYS; ETCHING; MICROOPTICS; PHOTOSENSITIVITY; REFRACTIVE INDEX; SILICA; SOL-GELS; ULTRAVIOLET RADIATION; ZIRCONIUM COMPOUNDS;

MICROLENS ARRAY; SELF PROCESSING FUNCTION;

MICROLENSES;

EID: 20544477360     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2005.846468     Document Type: Article

References (21)

1. W. Daschner, P. Long, R. Stein, C. Wu, and S. H. Lee, "Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass," Appl. Opt., vol. 36, pp. 4675-4680, 1997.
2. M. He, X. J. Yi, Z. H. Cheng, L. Q. Liu, and Y. R. Wang, "Fabrication of GaAs microlenses array with long focal length for improving responsivity of PtSi IRFPA device," Chin. J. Infrared Millimeter Waves, vol. 20, pp. 321-324, 2001.
3. M. T. Gale, M. Rossi, and J. Pedersen, "Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresist," Opt. Eng., vol. 33, pp. 3556-3566, 1994.
4. Y. Li, X. J. Yi, and J. H. Hao, "Design and fabrication of 128 × 128 diffractive microlens arrays on Si for PtSi FPA," in Proc. SPIE 3553, 1998, pp. 132-137.
5. 2 hybrid sol-gel material for fabrication 3 dimensional continuous surface relief diffractive optical elements by electron-beam lithography," Opt. Express, vol. 10, pp. 586-590, 2002.
6. 2 gel films fabricated with the two-ultraviolet-beam interference method," Appl. Opt., vol. 39, pp. 489-493, 2000.
7. P. Ayras, J. T. Rantala, R. Levy, M. R. Descour, S. Honkanen, and N. Peyghambarian, "Mutilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask," Thin Solid Films, vol. 352, pp. 9-12, 1999.
8. M. He, X. -C. Yuan, N. Q. Ngo, J. Bu, and V. Kudryashov, "Simple reflow fabrication of a microlens array in sol-gel glass," Opt. Lett., vol. 28, pp. 731-733, 2003.
9. M. He, X. -C. Yuan, J. Bu, and W. C. Cheong, "Fabrication of concave refractive microlens arrays in sol-gel glass using a simple proximity-effect-assisted reflow technique," Opt. Lett., vol. 29, pp. 1007-1009, 2004.
10. D. Blanc and S. Pelissier, "Fabrication of sub-micron period diffraction gratings in self-processing sol-gel glasses," Thin Solid Films, vol. 384, pp. 251-253, 2001.
11. D. Blanc, S. Pelissier, K. Saravanamuttu, S. I. Najafi, and M. P. Andrews, "Self-processing of surface relief gratings in photosensitive hybrid sol-gel glasses," Adv. Mater., vol. 11, pp. 1508-1511, 1999.
12. S. Pelissier, D. Blanc, M. P. Andrews, S. I. Najafi, A. V. Tishchenko, and O. Parriaux, "Single-step UV recording of sinusoidal surface gratings in hybrid solgel glasses," Appl. Opt., vol. 38, pp. 6744-6748, 1999.
13. R. T. Ingwall and M. Troll, "Mechanism of hologram formation in DMP-128 photopolymer," Opt. Eng., vol. 28, pp. 586-591, 1989.
14. G. Zhao and P. Monroulis, "Diffusion model of hologram formation in dry photopolymer materials," J. Mod. Opt., vol. 41, pp. 1929-1939, 1994.
15. V. L. Colvin, R. G. Larson, A. L. Harris, and M. L. Schilling, "Quantitative model of volume hologram formation in photopolymer," J. Appl. Phys., vol. 81, pp. 5913-5923, 1997.
16. R. R. Adhami, D. J. Lanteigne, and D. A. Gregory, "Photopolymer hologram formation theory," Microw. Opt. Technol. Lett., vol. 4, pp. 106-109, 1991.
17. J. T. Sheridan and J. R. Lawrence, "Non-local response diffusion model of holographic recording in photopolymer," J. Opt. Soc. Amer., vol. A17, pp. 1108-1114, 2000.
18. L. Lavielle and D. J. Lougnot, "Self-organization in dry photopolymerized acrylate films 1. irreversible thermodynamics analysis," J. Photochem. Photobiol. A: Chem., vol. 102, pp. 245-251, 1997.
19. V. V. Krongauz and C. C. Legere-Krongauz, "Morphological changes during anisotropic photopolymerization," Polymer, vol. 34, pp. 3614-3619, 1993.
20. J. J. Hunsinger, L. Simonin, J. P. Gonnet, B. Cros, and D. J. Lougnot, "Photochemically generated optical elements. I. A qualitative characterization of crosslinking gradients by low frequency microechography," Pure Appl. Opt., vol. 4, pp. 529-542, 1995.
21. P. Lefin, C. Fiorini, and J. M. Nunzi, "Anisotropy of the photoinduced translation diffusion of azo-dyes," Opt. Mater., vol. 9, pp. 323-328, 1998.