Fabrication of GaAs microlenses array with long focal length for improving responsivity of PtSi IRFPA device

Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves

Volumn 20, Issue 5, 2001, Pages 321-324

  He, Miao ^a   Yi, Xin Jian ^a   Cheng, Zu Hai ^a   Liu, Lu Qin ^a   Wang, Ying Rui ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

GaAs; Hybrid device; Ion beam milling; IRFPA device; Microlenses array

Indexed keywords

ARSENIC COMPOUNDS; INFRARED DEVICES; ION BEAMS; LENSES; SCANNING ELECTRON MICROSCOPY;

INFRARED FOCAL PLANE ARRAY; MICROLENSES ARRAY;

ARRAYS;

EID: 0035494485     PISSN: 10019014     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

1. Technique for monolithic fabrication of microlens arrays
2. Microlenses fabricated by melting a photoresist on a base-layer
3. Preshaping photoresist for refractive microlens fabrication
4. Technique for monolithic fabrication of silicon microlenses with selectable rim angles
5. Large area quartz glass microlens array fabricated by ion beam etching for focal plane detectors
6. Study on microlens array for linear IR detectors