Growth of Ni/Co-catalyzed crystalline CNx thin films by nitrogen-plasma-assisted pulsed laser deposition

Journal of the Korean Physical Society

Volumn 46, Issue SUPPL., 2005, Pages

  Li, Li ^a   Lin, Hao ^a   Sun, Jian ^a   Wu, Aimin ^a   Shen, Xiaokang ^a   Xu, Ning ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

Carbon nitride thin film; Glow discharge; Nanocrystallites; Nitrogen plasma assisted; Pulsed laser deposition

Indexed keywords

EID: 20444503978     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (19)

1. A. Y. Liu and M. L. Cohen, Science 245, 841 (1989).
2. Y. Togashi, Y. Hirohata and T. Hino, Vacuum 66, 391 (2002).
3. A. Y. Liu and R. M. Wentzcovitch, Phys. Rev. B 50, 10362 (1994).
4. D. M. Teter and R. J. Hemley, Science 271, 53 (1996).
5. S. L. Sung, C. H. Tseng, F. K. Chiang and X. J. Guo, Thin Solid Films 340, 169 (1999).
6. E. Gyorgy, V. Nelea, I. N. Mihailescu, A. Perrone, H. Pelletier, A. Cornet, S. Ganatsios and J. Werckmann, Thin Solid Films 388, 93 (2001).
7. X.-A. Zhao, C. W. Ong, Y. G. Tsang, Y. W. Wong, P. W. Chan and C. L. Choy, Appl. Phys. Lett. 66, 2652 (1995).
8. K. M. Yu, M. L. Cohen, E. E. Haller, W. L. Hansen, A. Y. Liu and I. C. Wu, Phys. Rev. B. 49, 5034 (1994).
9. T. Sebald, R. Kaltofen and G. Weise, Surface and Coatings Technology 98, 1280 (1998).
10. D. Li, Y. W. Chung, M. S. Wong and W. D. Sproul, J. Appl. Phys. 74, 219 (1993).
11. W. Yu, G. B. Ren, S. F. Wang, L. Han, X. W. Li, L. S. Zhang and G. S. Fu, Thin Solid Films 402, 55 (2002).
12. Z. Y. Chen, J. P. Zhao, T. Yano and T. Ooie, Appl. Phys. A 74, 213 (2002).
13. J. Ling, Y. Liu, G. M. Hao and X. G. Zhang, Materials and Engineering B 100, 186 (2003).
14. P. N. Wang, Ning Xu, Zhi-Feng Ying, Xuan-Tong Ying, Zheng-Ping Liu and Wei-Dong Yang, Thin Solid Films 382, 34 (2001).
15. N. Xu, F. Gui, H. Lin, Z. Ying, J. Wu, Y. Du and F. Li, J. Appl. Phys. 92, 496 (2002).
16. S. R. Salis, D. J. Gardiner, M. Bowden, J. Savage and D. Rodway, Diamond. Relat. Mater. 5, 589 (1996).
17. J. Schwan, S. Ulrich and S. R. P. Silva, J. Appl. Phys. 80, 440 (1996).
18. Y. F. Zhang, Z. H. Zhou and H. L. Li, Appl. Phys. Lett. 68, 634 (1996).
19. S. Muhl and J. M. Mendez, Diamond and Related Materials 8, 1809 (1999)