Elemental composition of nanoclusters formed by pulsed irradiation with low-energy ions during Ge/eSi epitaxy

JETP Letters

Volumn 79, Issue 7, 2004, Pages 333-336

  Dvurechenskii A V ^a   Smagina, Zh V ^a   Zinov'ev, V A ^a   Armbrister, V A ^a   Volodin, V A ^a   Efremov, M D ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 20444449751     PISSN: 00213640     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1765177     Document Type: Article

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