Experimental investigation of a distributed conveyance system using air flow

Proceedings of the International Symposium on Micromechatronics and Human Science

Volumn , Issue , 1998, Pages 195-200

  Konishi, Satoshi ^a   Mizoguchi, Yasushi ^a   Harada, Masatoshi ^a   Ohno, Kazuyuki ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONVEYORS; DISTRIBUTED PARAMETER CONTROL SYSTEMS; SEMICONDUCTOR DEVICE MANUFACTURE;

DISTRIBUTED CONVEYANCE SYSTEM; MICROMANIPULATION;

MECHATRONICS;

EID: 0032316715     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)