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Volumn , Issue 1669, 2003, Pages

Methoden der Oberflächenmessfechnik

(1) Wilkening, G a,b

a FB 51 ^*

b PHYSIKALISCH TECHNISCHE BUNDESANSTALT (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2042516218 PISSN: 00835560 EISSN: None Source Type: Book Series
DOI: None Document Type: Review

Times cited : (6)

References (16)

1
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- International Technology Roadmap for Semiconductors

2
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- Vorburger, T.¹ Dagata, J.A.² Wilkening, G.³ Iizuka, K.⁴

3
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- Development at NIST in high-precision length metrology for microelectronics
- "Requirements and recent developments in high precision length metrology", Braunschweig, November
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- (2001) PTB Report , vol.F-45 , pp. 112-128
- Swyt, D.¹

4
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- Report on contract Mr. 3442/1/0/189/91/7-BCR-D(30), Community Bureau of Reference, Commission of the European Communitites, Brussels
- D. Hantke, M. McCarthy, A. Hawryliw: The development of a two dimensional high precision photomask position standard; Report on contract Mr. 3442/1/0/189/91/7-BCR-D(30), Community Bureau of Reference, Commission of the European Communitites, Brussels, 1995
- (1995) The Development of a Two Dimensional High Precision Photomask Position Standard
- Hantke, D.¹ McCarthy, M.² Hawryliw, A.³

5
- 0033327378
- About traceability, reproducibility and comparability of grid calibrations
- H. Bosse, W. Häßler-Grohne, B. Brendel: About traceability, reproducibility and comparability of grid calibrations; SPIE Proceedings, Vol. 3873, 1999, pp. 477-483
- (1999) SPIE Proceedings , vol.3873 , pp. 477-483
- Bosse, H.¹ Häßler-Grohne, W.² Brendel, B.³

6
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- Dr. Johannes Heidenhain GmbH; 83292 Traunreut, Germany
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7
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- Eine Liste ist hier zu finden: 〈〈http://www.ptb.de/de/org/5/51/ 512/_index.htm〉〉 unter "Mess- und Kalibriermöglichkeiten"
- Mess- und Kalibriermöglichkeiten

8
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- Tiefen- und Längennormale aus Silizium
- 〈〈www.gemac-chemnitz.de〉〉; siehe auch : J. Frühauf, S. Krönert, U. Brand: Tiefen- und Längennormale aus Silizium; Technisches Messen 7/8 (2001), p. 326-332
- (2001) Technisches Messen , vol.7-8 , pp. 326-332
- Frühauf, J.¹ Krönert, S.² Brand, U.³

9
- 0012225487
- Nanometre scale transfer Standards
- Bremen, Germany, May 31st - June 4th
- st euspen International Conference, Bremen, Germany, May 31st - June 4th, 1999, p. 134-137
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10
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11
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- U. Brand, T. Kleine-Besten, H. Schwenke: Develoment of a special CMM for Dimensional Metrology on Microsystem Components; Proc. 15th Ann.Meeting of the American Society of Precision Engineering; Scottsdale, Arizona, 22-27 October 2000
- (2000) Proc. 15th Ann.Meeting of the American Society of Precision Engineering
- Brand, U.¹ Kleine-Besten, T.² Schwenke, H.³

12
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- The fabrication of nano-roughness standards for the calibration of atomic force microscopes
- Virginia, USA
- H.H. Gatzen, C. Kourouklis: The Fabrication of Nano-Roughness Standards for the Calibration of Atomic Force Microscopes; Proc. ASPE 16th Ann. Meeting, Virginia, USA, pp. 493-496, 2001
- (2001) Proc. ASPE 16th Ann. Meeting , pp. 493-496
- Gatzen, H.H.¹ Kourouklis, C.²

13
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- Progress in graytone lithography and replication techniques for different materials
- MF-Conf., Micromachine Technology for Diffractive and Holographic Optics, Santa Clara
- K. Reimer, R. Engelke, U. Hofmann, P. Merz, K.T. Kohlmann v. Platen, B. Wagner: Progress in Graytone Lithography and Replication Techniques for Different Materials; SPIE Vol. 3879, MF-Conf., Micromachine Technology for Diffractive and Holographic Optics, Santa Clara, 1999, p.98
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14
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- E. Brinksmeier, W. Preuss, A. Gessenharter: Manufacturing of Calibration Standards by Diamond Machining; Proc 2nd euspen international Conf. - Turin, Italy - May 2001, p 680-583
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- Brinksmeier, E.¹ Preuss, W.² Gessenharter, A.³

15
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- Intercomparison of scanning probe microscopes
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- Breil, R.¹

16
- 4444304883
- Results of the inter-laboratory comparison "determination of nanometric step heights with atomic force microscopy
- Bergisch Gladbach, Germany, November 15th & 16th, 2001; PTB-Bericht F-44, Physikalisch-Technische Bundesanstalt, Braunschweig, Germany
- th Seminar on Quantitative Microscopy and 1st Seminar on Nanoscale Calibration Standards and Methods (NanoScale 2001), Bergisch Gladbach, Germany, November 15th & 16th, 2001; PTB-Bericht F-44, Physikalisch-Technische Bundesanstalt, Braunschweig, Germany (2001), p. 70
- (2001) th Seminar on Quantitative Microscopy and 1st Seminar on Nanoscale Calibration Standards and Methods (NanoScale 2001) , pp. 70
- Senoner, M.¹ Koenders, L.² Unger, W.³ Wilkening, G.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.