Self-assembled silicon nano-bridges as an enabler for nano-sensors

2004 4th IEEE Conference on Nanotechnology

Volumn , Issue , 2004, Pages 143-145

  Kamins, T I ^a   Islam, M Saif ^a   Sharma, S ^a   Williams, R Stanley ^a  

^a HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

CVD; Nanotechnology; Semiconductor device fabrication; Semiconductor growth; Silicon

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRODES; ETCHING; NANOSTRUCTURED MATERIALS; SCANNING TUNNELING MICROSCOPY; SELF ASSEMBLY; SEMICONDUCTOR GROWTH; SENSORS;

ELECTRON DEPOSITION; INDIUM TIN OXIDE (ITO); ORGANIC LIGHT EMITTING DIODES (OLED); SEMICONDUCTOR DEVICE FABRICATION;

SILICON;

EID: 20344401580     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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2. J. Westwater, D. P. Gosain, S. Tomiya, S. Usui, and H. Ruda, J. Vac. Sci. Technol. B, vol. 15, pp. 554-557, May 1997.
3. T. I. Kamins, R. Stanley Williams, D. P. Basile, T. Hesjedal, and J. S. Harris, J. Appl. Phys., vol. 89, pp. 1008-1016, 15 January 2001.
4. A. M. Morales and C. M. Lieber, Science, vol. 279, pp. 208-211, January 9, 1998.
5. M. Saif Islam, S. Sharma, T. I. Kamins, and R. Stanley Williams, Nanotechnology, vol. 15, pp. L5-L8, May 2004.
6. T. I. Kamins, X. Li, R. Stanley Williams, and X. Liu, Nano Letters, vol. 4, pp. 503-506, 2004.