The fabrication of oxidized porous silicon membrane and its application to RF module

IEEE Topical Meeting on Electrical Performance of Electronic Packaging

Volumn 2002-January, Issue , 2002, Pages 87-90

  Ha, Man Lyun ^a   Shin, Seong Ho ^a   Nam, Choong Mo ^b   Kwon, Young Se ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Telephus Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COPLANAR WAVEGUIDES; ELECTRIC INDUCTORS; ELECTRONICS PACKAGING; LOW NOISE AMPLIFIERS; MEMBRANES; MIM DEVICES; NOISE FIGURE; OXIDATION; SILICON WAFERS;

DESIGN LIBRARY; INDUCTIVELY DEGENERATED; INPUT MATCHING; ITS APPLICATIONS; OXIDIZED POROUS SILICON; PASSIVE ELEMENTS; SPIRAL INDUCTOR; THERMAL OXIDATION;

POROUS SILICON;

EID: 20344382382     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EPEP.2002.1057889     Document Type: Conference Paper

References (11)

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