Self-assembling iron silicide nanobars and structure on silicon wafer by microwave plasma method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5650, Issue , 2005, Pages 365-372

  Xu, B X ^a   Zhang, Y ^a   Zhu, H S ^b   Shen, D Z ^a   Wu, J L ^c   Xue, Z Q ^c   Wu, Q D ^c  

^a TSINGHUA UNIVERSITY   (China)

^b BEIJING INSTITUTE OF TECHNOLOGY   (China)

^c PEKING UNIVERSITY   (China)

Author keywords

Iron silicide; Nano materials; Nanostructure; Self assembly

Indexed keywords

CARBON NANOTUBES; ENERGY DISPERSIVE SPECTROSCOPY; IRON COMPOUNDS; MAGNETIC FIELDS; MAGNETIZATION; MICROWAVES; PLASMA APPLICATIONS; SCANNING ELECTRON MICROSCOPY; SELF ASSEMBLY; SILICON WAFERS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

IRON SILICIDE; MICROWAVE PLASMAS; NANO-MATERIALS; NANOBARS;

NANOSTRUCTURED MATERIALS;

EID: 20344364177     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.581984     Document Type: Conference Paper

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