Structure studies of microcrystalline silicon thin film using Raman scattering and photo thermal deflection spectra

Guangdianzi Jiguang/Journal of Optoelectronics Laser

Volumn 16, Issue 2, 2005, Pages 167-170

  Zhang, Xiao Dan ^a   Zhao, Ying ^a   Zhu, Feng ^a   Wei, Chang Chun ^a   Mai, Yao Hua ^a   Gao, Yan Tao ^a   Sun, Jian ^a   Hou, Guo Fu ^a   Geng, Xin Hua ^a   Xiong, Shao Zhen ^a  

^a NANKAI UNIVERSITY   (China)

Author keywords

Microcrystalline silicon ( c Si) thin film; Photo thermal deflection spectra (PDS); Raman scattering spectra

Indexed keywords

CRYSTALLINE MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; SILICON; SOLAR CELLS; SUBSTRATES;

MICROCRYSTALLINE SILICON (ΜC-SI) THIN FILM; PHOTO THERMAL DEFLECTION SPECTRA; RAMAN SCATTERING SPECTRA;

THIN FILMS;

EID: 20144388049     PISSN: 10050086     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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