Selective sublimation processing of thin films for gas sensing

Sensors and Actuators, B: Chemical

Volumn 108, Issue 1-2 SPEC. ISS., 2005, Pages 15-20

  Guidi, Vincenzo ^a   Martinelli, Giuliano ^a   Schiffrer, Giuliano ^a   Vomiero, Alberto ^b   Scian, Carlo ^b   Della Mea, Gianantonio ^b   Comini, Elisabetta ^c   Ferroni, Matteo ^c   Sberveglieri, Giorgio ^c  

^a UNIVERSITY OF FERRARA   (Italy)

^b LABORATORI NAZIONALI DI LEGNARO   (Italy)

^c UNIVERSITY OF BRESCIA   (Italy)

Author keywords

Gas sensing; Processing of thin films; Titania

Indexed keywords

ANNEALING; DIFFUSION; NANOSTRUCTURED MATERIALS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SUBLIMATION; THIN FILMS; TITANIUM COMPOUNDS;

DIFFUSION EQUATION; PROCESSING OF THIN FILMS; SELECTIVE SUBLIMATION PROCESSING (SSP); TITANIA;

CHEMICAL SENSORS;

EID: 19744379012     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.10.060     Document Type: Conference Paper

References (23)

1. 2 sensors based on nanosized thin films of titanium-tungsten oxides Sens. Actuators B 31 1996 89 92
2. V. Guidi, E. Comini, G. Faglia, and M. Ferroni Mixed nanostructured oxides of Ti and VI-B-group elements for gas sensing F. Maloberti Proceedings of the IEEE Sensors 2002
3. M. Ferroni, V. Guidi, G. Martinelli, E. Comini, G. Sberveglieri, A. Vomiero, and G. Della Mea Selective sublimation processing of a molydbelum-tungsten mixed oxide thin film J. Vac. Sci. Technol. B 21 2003 1442 1448
4. 3 thin films for gas-sensing application Sens. Actuators B 77 2001 555 560
5. 2 and Mo-W-O thin films by sputtering: tailoring of composition and porosity by thermal treatment Mater. Sci. Eng. B 101 2003 216 221
6. 2 thin films Adv. Mater. 8 1996 334 337
7. M.C. Carotta, M. Ferroni, V. Guidi, and G. Martinelli Preparation and characterization of nanostructured titania thick films Adv. Mater. 11 1999 943 946
8. M. Ferroni, V. Guidi, G. Martinelli, G. Roncarati, E. Comini, G. Sberveglieri, A. Vomiero, and G. Della Mea Coalescence inhibition in nanosized titania films and related effects on chemoresistive properties towards ethanol J. Vac. Sci. Technol. B 20 2002 523 530
9. L.R. Doolittle Nucl. Instrum. Meth. B 9 1985 344
10. Handbook of Chemistry and Physics, 79th ed., 1998-1999, CRC Press Inc.
11. T.Y. Tien, H.L. Stadler, E.F. Gibbons, and P.J. Zacmanidis Ceram. Bull. 54 1975 280
12. 2 Phys. Rev. B 28 1983 3427 3438
13. T. Akio, M. Toshitaka, K. Nobuo, US Patent No. 54656863 (1987).
14. 5 thin film by ion-beam-enhanced deposition Sens. Actuators B 32 1996 209 213
15. K. Zakrzewska, M. Radecka, and M. Rekas Effect of Nb, Cr, Sn additions on gas sensing properties of TiO2 thin films Thin Solid Films 310 1997 161 166
16. R.K. Sharma, M.C. Bhatnagar, and G.L. Sharma Mechanism in Nb doped titania oxygen gas sensor Sens. Actuators B 46 1998 194 201
17. N. Bonini, M.C. Carotta, V. Guidi, C. Malagù, G. Martinelli, L. Paglialonga, and M. Sacerdoti Doping of a nanostructured titania thick-film: structural and electrical investigations Sens. Actuators B 68 2000 274 280
18. G. Deo, A.M. Turek, I.E. Wachs, T. Machej, J. Haber, N. Das, H. Eckert, and A.M. Hirt Appl. Catal. A 91 1992 27
19. C. Malagù, V. Guidi, M.C. Carotta, and G. Martinelli Unpinning of Fermi level in nanostructured chemo-resistive semiconductors Appl. Phys. Lett. 84 2004 4158 4160
20. V. Guidi, M.C. Carotta, M. Ferroni, G. Martinelli, and M. Sacerdoti Effect of dopants on grain coalescence and oxygen mobility in nanostructured titania anatase and rutile J. Phys. Chem. B 107 2003 120 124
21. 2 anatase-to-rutile phase transition J. Appl. Phys. 92 2002 853 861
22. S. Matsushima, Y. Teraoka, N. Miura, and N. Yamazoe Jpn. J. Appl. Phys. 27 1988 1978
23. V.Ya. Sukharev, Semiconductor Sensors in Phisico-Chemical Studies, Elsevier, Amsterdam, 1996. p. 231 (Chapter 1).