Nanosized Ti-doped MoO3 thin films for gas-sensing application

Sensors and Actuators, B: Chemical

Volumn 77, Issue 1-2, 2001, Pages 555-560

  Guidi, V ^a,d   Boscarino, D ^b   Casarotto, L ^a   Comini, E ^c   Ferroni, M ^a   Martinelli, G ^a,d   Sberveglieri, G ^c  

^a UNIVERSITY OF FERRARA   (Italy)

^b LABORATORI NAZIONALI DI LEGNARO   (Italy)

^c UNIVERSITY OF BRESCIA   (Italy)

^d INFN SEZIONE DI FERRARA   (Italy)

Author keywords

Gas sensor; Sputtering; Ti:MoO3

Indexed keywords

FILM PREPARATION; MOLYBDENUM COMPOUNDS; NANOSTRUCTURED MATERIALS; SEMICONDUCTOR DOPING; SPUTTER DEPOSITION; THIN FILMS; TITANIUM;

MOLYBDENUM TRIOXIDE;

CHEMICAL SENSORS;

EID: 0035876415     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00703-1     Document Type: Article

References (8)

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4. 3 detection
5. Characterization of a molybdenum oxide sputtered thin film as a gas sensor
6. 2 detection
7. x and CO
8. 2 doped with palladium