Selective sublimation processing of a molybdenum-tungsten mixed oxide thin film

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 4, 2003, Pages 1442-1448

  Ferroni, M ^a   Guidi, V ^b   Comini, E ^a   Sberveglieri, G ^a   Vomiero, A ^c,d   Delia Mea, G ^c,d   Martinelli, G ^a  

^a INFM   (Italy)

^b INFN SEZIONE DI FERRARA   (Italy)

^c UNIVERSITY OF TRENTO   (Italy)

^d LABORATORI NAZIONALI DI LEGNARO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; MOLYBDENUM; NEGATIVE IONS; OXIDES; SPUTTERING; SUBLIMATION; TUNGSTEN;

REACTIVE SPUTTERING;

THIN FILMS;

EID: 0141458225     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1592810     Document Type: Conference Paper

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