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Volumn 247, Issue 1-4, 2005, Pages 396-400
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Laser-induced epitaxial recrystallization after alkali-ion implantion into α-quartz
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Author keywords
Epitaxy; Excimer laser irradiation; Ion implantation; Quartz
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Indexed keywords
ACTIVATION ENERGY;
AMORPHIZATION;
DIFFUSION;
EPITAXIAL GROWTH;
EXCIMER LASERS;
LASER BEAM EFFECTS;
PHOTONS;
QUARTZ;
RECRYSTALLIZATION (METALLURGY);
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
ENERGY DENSITY;
EPITAXIAL RECRYSTALLIZATION;
EXCIMER LASER IRRADIATION;
PHOTONIC APPLICATIONS;
ION IMPLANTATION;
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EID: 19744372138
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2005.01.045 Document Type: Article |
Times cited : (14)
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References (30)
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