Capacitive micromachined ultrasonic transducer with an open-cells structure

Sensors and Actuators, A: Physical

Volumn 121, Issue 2, 2005, Pages 382-387

  Caliano, Giosuè ^a   Savoia, Alessandro ^a   Caronti, Alessandro ^a   Foglietti, Vittorio ^b   Cianci, Elena ^b   Pappalardo, Massimo ^a  

^a ROMA TRE UNIVERSITY   (Italy)

^b IFN CNR   (Italy)

Author keywords

Capacitive; cMUT; Micromachining; Transducer; Ultrasonic

Indexed keywords

ACOUSTOELECTRIC EFFECTS; ELECTRIC POTENTIAL; ELECTROSTATICS; MICROMACHINING; NATURAL FREQUENCIES; NONDESTRUCTIVE EXAMINATION; PIEZOELECTRIC TRANSDUCERS; SILICON; ULTRASONICS;

ACOUSTIC ENERGY; CAPACITIVE; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT); SILICON SUBSTRATE;

ULTRASONIC TRANSDUCERS;

EID: 19744368554     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.03.045     Document Type: Article

References (9)

1. M. Haller, and B.T. Khuri-Yakub IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 43 1 1996 1 6
2. P. Eccardt, K. Niederer, T. Scheiter, and C. Hierold IEEE Ultrason. Symp. 1996 959 962
3. X. Jin, I. Ladabaum, and B.T. Khuri-Yakub IEEE J. Microelectromech. Syst. 7 3 1998 295 302
4. Ö. Oralkan, X. Jin, K. Kaviani, A.S. Ergun, F.L. Degertekin, M. Karaman, and B.T. Khuri-Yakub IEEE Ultrason. Symp. PR, USA 2000
5. S. Panda, C. Daft, P. Wagner, I. Ladabaum, P. Pellegretti, and F. Bertora WFUMB (hosted by AIUM) Conference Montreal 2003
6. D.M. Mills, and L.S. S Smith IEEE Ultrason. Symp. Honululu, USA 2003
7. W. Kuhl, G. Schodder, and F. Schroder Acustica 4 1954 520
8. D. Schindel, D. Hutchins, L. Zou, and M. Sayer IEEE Trans. Ultrason. Ferroelect. Freq. Contr. 42 1995 42
9. I. Ladabaum, X. Jin, H.T. Soh, A. Atalar, and B.T. Khuri-Yakub IEEE Trans. Ultrason. Ferroelect. Freq. Contr. 45 3 1998 678