Deposition of thin films by uv light laser ablation

Surface Engineering

Volumn 13, Issue 1, 1997, Pages 71-74

  Maeda, R ^a   Kikuchi, K ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPOSITION EFFECTS; CRYSTAL MICROSTRUCTURE; CUBIC BORON NITRIDE; DEPOSITION; EXCIMER LASERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BOMBARDMENT; LASER ABLATION; LEAD COMPOUNDS; PEROVSKITE; ULTRAVIOLET RADIATION;

LEAD ZIRCONATE TITANATE (PZT) THIN FILMS; PHOTOCHEMICAL ABLATION;

THIN FILMS;

EID: 0030696465     PISSN: 02670844     EISSN: None     Source Type: Journal    
DOI: 10.1179/sur.1997.13.1.71     Document Type: Article

References (7)

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