Design, modeling, and testing of micromachined piezoelectric clamped-clamped beam resonators

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 2000-AB, Issue , 2000, Pages 293-298

  Piekarski, Brett ^a,b   DeVoe, Don L ^b   Kaul, Roger ^a   Dubey, Madan ^a  

^a U S ARMY RESEARCH LABORATORY   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; MACHINE DESIGN; MEMS; RESONATORS;

BEAM RESONATORS; CLAMPED-CLAMPED BEAM; DESIGN MODELS; DESIGN PERFORMANCE; FINITE ELEMENT SOLUTION; MEMS (MICROELECTROMECHANICAL SYSTEM); MICRO-MACHINED; PIEZOELECTRIC; SINGLE-BEAM; VACUUM PRESSURE;

PIEZOELECTRICITY;

EID: 84903607657     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2000-1106     Document Type: Conference Paper

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