SEM investigation of pillared microstructures formed by electrochemical anodization

Applied Physics A: Materials Science and Processing

Volumn 67, Issue 4, 1998, Pages 487-492

  Vorobyova, A I ^a   Sokol, V A ^a   Outkina, E A ^a  

^a BELARUSIAN STATE UNIVERSITY OF INFORMATICS AND RADIOELECTRONICS   (Belarus)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ANODIC OXIDATION; CATHODES; FLAT PANEL DISPLAYS; MORPHOLOGY; OPTOELECTRONIC DEVICES; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; SOLAR CELLS; THIN FILMS;

ALUMINUM FILM; PILLARED MICROSTRUCTURE;

MICROSTRUCTURE;

EID: 0032179656     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050808     Document Type: Article

References (11)

1. C.M. Zelenski, G.L. Hornyak, P.K. Dorhout: Nanostract. Mater. 9(1-8), 173 (1997)
2. J.M. Macaulay, I. Brodie, C.A. Spindt, C.E. Holland: Appl. Phys. Lett. 61(8), 24 (1992)
3. US Patent. 5461009, H01L 21/465 (1997)
4. S. Okuyama, K. Umemoto, K. Okuyama: Jpn. J. Appl. Phys. Part 1 36(3A), 1228 (1997)
5. E. Palibroda, T. Farcas, A. Lupsan: Mater. Sci. Eng. B 32(1-2), 1 (1995)
6. A. Vorobyova, E. Outkina: Thin Solid Films 324(1-2), 1 (1998)
7. V.A. Labunov, A.I. Vorobyova, V.A. Sokol et al.: Dokl. Akad. Nauk. BSSR 33(10), 40 (1989)
8. G.I. Hunger (Ed.): Fundamental Methods of Investigation in Metallurgy (Metallurgy, Moscow 1985) (in Russian)
9. E. Averynov: Guide on Anodization (Machinostroenie, Moscow 1988)
10. G. Patermarakis, H.S. Karayannis: Electrochim. Acta 40(16), 2647 (1995)
11. G.E. Thompson, K. Shimizu, P. Skeldon et al.: J. Electrochem. Soc. 137(3), 122 (1990)